Arnaud Bertsch

Teaching & PhD PhD Students Tao Zhang, Pol Torres Vila, Nicolas Bruno Minazzo Past EPFL PhD Students as codirector Joan Teixidor, Clémentine Sophie Sarah Lipp, Nicolas Grégoire Maïno, Jiande Zhou, Jongeon Park Courses Advanced microfabrication practicals MICRO-373 This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD students/postdocs during 14 weeks touching all aspects of a microprocess. MEMS practicals I MICRO-501 The goal of this practical work is to create thermal micro-actuators consisting of micro-cantilevers made out of silicon dioxide and covered by chromium meander-shaped electrical tracks and contact pads. MEMS sensors practicals MICRO-503 The objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class.