Course

MICRO-373: Advanced microfabrication practicals

Summary

This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD students/postdocs during 14 weeks touching all aspects of a microprocess.

Lectures

Instructors (6)

Jürgen Brugger

I am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.

Christophe Moser

Dr. Christophe Moser is Associate Professor of Microengineering and Industrial Relations at the Swiss Federal Institute of Technology in Lausanne. He was the co-founder and CEO of Ondax,Inc for ten years prior to joining EPFL. During this decade, he raised $15 million from corporate and venture capital sources to fund volume production of thick holographic components in glass and develop devices enabled by these components such as tunable add-drop multiplexers for telecommunications, ultra-narrowband notch filters for low frequency Raman systems, high power semi-conductor frequency-narrowed pumps for fiber lasers, single frequency fixed and tunable lasers for sensing and femtosecond pulse compressors for micro-machining applications. Dr. Moser has a Ph.D. in Electrical Engineering from the California Institute of Technology, a minor in finance and a bachelor degree in Physics from EPFL. He is the co-inventor of 24 patents, 14 peer reviewed scientific publications, 9 IEEE proceedings and a book chapter. Private interests include tennis, running, ski, basketball and family excursions. 2010: Associate Professor, EPFL, faculty Science Technique Ingenieur. 2000-2010: co-founder, CEO Ondax, Inc. 1995-2000: Graduate Research Assistant, California Institute of Technology. 1993-1995: Engineering Project manager , TESA. 1988-1993: Bachelor candidate in Physics, EPFL. MAIN PUBLICATIONS:

Moser C., Havermeyer F,.Ultra-narrowband tunable laserline notch filter, Appl. Phys. B, 95 (3), pp 597-601, 2009.

Moser C. ,Ho L., Havermeyer F,. Self-aligned Non-dispersive External Cavity Tunable Laser, 16 (21), 16691-16696 Optics Express, 2008.

Steckman, GJ , Moser C. et al. Volume holographic grating wavelength stabilized laser diodes, IEEE J. Of Selected Topics in Quantum Electronics, (13), 672-678, 2007.

Buse K, Havermeyer F, Liu W., Moser C, Psaltis D. Holographic Filters , Book Chapter Photorefractive Materials and their Applications, 2005.

Havermeyer, F; Liu, WH; Moser, C, et al. Volume holographic grating-based continuously tunable optical filter , Opt. Eng. 43 (9), 2017-2021, 2004.

Moser C., Maravic I., Schupp B., Adibi A, Psaltis D, Diffraction efficiency of localized holograms in doubly doped LiNbO3 crystals, Opt. Lett. 25: (17),1243-1245, 2000.

Arnaud Bertsch

Teaching & PhD PhD Students Tao Zhang, Pol Torres Vila, Nicolas Bruno Minazzo Past EPFL PhD Students as codirector Joan Teixidor, Clémentine Sophie Sarah Lipp, Nicolas Grégoire Maïno, Jiande Zhou, Jongeon Park Courses Advanced microfabrication practicals MICRO-373 This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD stude

Abdeljalil Sayah

Teaching & PhD Courses Advanced microfabrication practicals MICRO-373 This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD students/postdocs during 14 weeks touching all aspects of a microprocess. Microfabrication practicals MICRO-332 The goal of this course is to introduce students to the practical aspects

Ye Pu

11/2008 - Present: Postdoctoral scientist, Swiss Federal Institute of Technology at Lausanne (École Polytechnique Fédérale de Lausanne, EPFL) 02/2003 - 10/2008: Postdoctoral scholar, California Institute of Technology 07/1999 - 01/2003: Ph.D. studies, State University of New York at Buffalo (SUNY Buffalo) 11/1995 06/1999: M.S. studies, Kansas State University Full CV

Yujia Zhang

Expertise Dropletronics: microscale droplet-based modular iontronics (e.g., batteries, diodes, transistors, memristors and circuits)Bioiontronics and bioelectronicsFunctional synthetic, cellular and hybrid tissuesBioengineering and human-machine interfaceAdvanced manufacturing of soft and living matter across multiple scales 2026 Masters Semester Project/Thesis, PhD and Postdoc Positions Many opportunities exist in microengineering, bioengineering, materials science, microrobots, programming and AI; please

Official source

Moodle Page

http://go.epfl.ch/MICRO-373

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Summary

Lectures

Instructors (6)

Jürgen Brugger

Christophe Moser

Moser C., Havermeyer F,.Ultra-narrowband tunable laserline notch filter, Appl. Phys. B, 95 (3), pp 597-601, 2009.

Moser C. ,Ho L., Havermeyer F,. Self-aligned Non-dispersive External Cavity Tunable Laser, 16 (21), 16691-16696 Optics Express, 2008.

Steckman, GJ , Moser C. et al. Volume holographic grating wavelength stabilized laser diodes, IEEE J. Of Selected Topics in Quantum Electronics, (13), 672-678, 2007.

Buse K, Havermeyer F, Liu W., Moser C, Psaltis D. Holographic Filters , Book Chapter Photorefractive Materials and their Applications, 2005.

Havermeyer, F; Liu, WH; Moser, C, et al. Volume holographic grating-based continuously tunable optical filter , Opt. Eng. 43 (9), 2017-2021, 2004.

Moser C., Maravic I., Schupp B., Adibi A, Psaltis D, Diffraction efficiency of localized holograms in doubly doped LiNbO3 crystals, Opt. Lett. 25: (17),1243-1245, 2000.

Official source

Moodle Page

http://go.epfl.ch/MICRO-373

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