Course

MICRO-501: MEMS Actuator practicals

Summary

The goal of this practical work is to create thermal micro-actuators consisting of micro-cantilevers made out of silicon dioxide and covered by chromium meander-shaped electrical tracks and contact pads.

Lectures

Instructors (2)

Jürgen Brugger

I am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.

Arnaud Bertsch

Teaching & PhD PhD Students Tao Zhang, Pol Torres Vila, Nicolas Bruno Minazzo Past EPFL PhD Students as codirector Joan Teixidor, Clémentine Sophie Sarah Lipp, Nicolas Grégoire Maïno, Jiande Zhou, Jongeon Park Courses Advanced microfabrication practicals MICRO-373 This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD stude

Official source

Moodle Page

http://go.epfl.ch/MICRO-501

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Summary

Lectures

Instructors (2)

Jürgen Brugger

Arnaud Bertsch

Official source

Moodle Page

http://go.epfl.ch/MICRO-501

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