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MOOC
Micro and Nanofabrication (MEMS)
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Lectures in this MOOC (64)
Clip Mask Fabrication
MOOC: Micro and Nanofabrication (MEMS)
Showcases the practical steps of fabricating a mask for UV lithography.
Thermal Evaporation Process
MOOC: Micro and Nanofabrication (MEMS)
Explains the thermal evaporation process in a vacuum chamber for micro-nano fabrication.
Clip Mask Aligner Lithography
MOOC: Micro and Nanofabrication (MEMS)
Covers UV lithography using a clip mask aligner for micro and nanofabrication.
Sputtering in CMi
MOOC: Micro and Nanofabrication (MEMS)
Covers the operation of a cluster sputtering tool and the process of changing sputter targets.
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