Micro and Nanofabrication (MEMS)

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Lectures in this MOOC (64)

Lithography: Tools and Techniques MOOC: Micro and Nanofabrication (MEMS)

Covers the principles and tools used in lithography for micro and nanofabrication.

Sputtering: Film Growth and Control Parameters MOOC: Micro and Nanofabrication (MEMS)

Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

Electron Beam Lithography: Tool Overview MOOC: Micro and Nanofabrication (MEMS)

Explores electron beam lithography, covering electron gun brightness, lens aberrations, beam diameter, and tool implementation.

Cleanroom Basics: Cleanroom Strategy MOOC: Micro and Nanofabrication (MEMS)

Covers methods for achieving high air purity in cleanroom environments for microfabrication processes.

Microphones in Smartphones MOOC: Micro and Nanofabrication (MEMS)

Covers the design and fabrication of MEMS microphones used in smartphones.

Sputtering: Plasma Formation and Thin Film Deposition MOOC: Micro and Nanofabrication (MEMS)

Covers sputtering, plasma creation, and thin film deposition processes.

Lithography: Resist Properties and Exposure Methods MOOC: Micro and Nanofabrication (MEMS)

Covers lithography concepts, resist properties, exposure methods, and pattern transfer techniques.

Microfabrication Techniques: Inspection and Metrology MOOC: Micro and Nanofabrication (MEMS)

Explores microfabrication techniques for inspection and metrology in MEMS applications.

Lithography: General Concepts and Mask Fabrication MOOC: Micro and Nanofabrication (MEMS)

Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.

Electron Beam Lithography: II Electron Optics and Beam Deflection MOOC: Micro and Nanofabrication (MEMS)

Covers electron beam control, focusing, lens types, and writing strategies.

Electron Beam Lithography: Proximity Effect Corrections MOOC: Micro and Nanofabrication (MEMS)

Explores proximity effect corrections in electron beam lithography for small and large features, emphasizing the importance of beam point spread function modeling.

MEMS Products: Accelerometer MOOC: Micro and Nanofabrication (MEMS)

Explores successful MEMS products like accelerometers and their fabrication process, as well as their application in car airbags and smartphones.

PVD 3: Sputtering and Paschen's Law MOOC: Micro and Nanofabrication (MEMS)

Explores spatial zones in glow discharge and Paschen's law.

Lithography: Scanning Probe Lithography MOOC: Micro and Nanofabrication (MEMS)

Delves into scanning probe lithography, exploring its principles and potential applications in nano-fabrication.

Sputtering: Ion Target Interactions MOOC: Micro and Nanofabrication (MEMS)

Examines ion-target interactions in PVD sputtering processes, covering compound deposition, surface damage, and factors influencing target ejection rates.

Lithography: Electron Beam Lithography and Resists MOOC: Micro and Nanofabrication (MEMS)

Explores electron beam lithography using PMMA and HSQ resists, multi-layer processes, and alignment techniques.

Mechanical Surface Profiling: AFM Applications MOOC: Micro and Nanofabrication (MEMS)

Explores mechanical surface profiling and AFM applications for high-resolution surface characterization.

Thin Film Growth: Atoms Arrival and Adhesion MOOC: Micro and Nanofabrication (MEMS)

Delves into thin film growth, adhesion, crystal structure, and stresses.

Lithography: Photoresist Sensitivity and Modulation Transfer Function MOOC: Micro and Nanofabrication (MEMS)

Discusses photoresist properties in lithography resolution and the role of the optical transfer function.

Micro and Nanofabrication: Basics and Techniques MOOC: Micro and Nanofabrication (MEMS)

Covers the basics of micro and nano fabrication techniques for MEMS devices.

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