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Micro and Nanofabrication (MEMS)

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Lectures in this MOOC (64)

Electron Beam Lithography: Interactions and Resist Contrast MOOC: Micro and Nanofabrication (MEMS)

Explores electron-sample interactions and resist contrast in lithography for high-resolution fabrication.

Etch Stop Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Transparent Conductive Oxide: Sputtering MOOC: Micro and Nanofabrication (MEMS)

Explores sputtering principles for transparent conductive oxide in solar cells and the use of piezoelectric materials for sensors and filters.

Stress in Thin Films: Film Growth and Microfabrication MOOC: Micro and Nanofabrication (MEMS)

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Inspection and Metrology: Thin Film Measurement Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores thin film measurement techniques in micro and nanofabrication processes, comparing reflectometry and ellipsometry for accuracy and methodology.

Chemical Vapor Deposition: Processes and Applications MOOC: Micro and Nanofabrication (MEMS)

Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.

Physical Vapor Deposition: Basics and Applications MOOC: Micro and Nanofabrication (MEMS)

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Chemical Vapour Deposition: Thin Films & Oxidation MOOC: Micro and Nanofabrication (MEMS)

Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.

Bulk Acoustic Wave Resonators in MEMS MOOC: Micro and Nanofabrication (MEMS)

Explores the design and fabrication of Bulk Acoustic Wave resonators for smartphone applications in RF front-end modules.

Wet Etching: Glass and Silicon MOOC: Micro and Nanofabrication (MEMS)

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Lithography: Mask and Laser Writing MOOC: Micro and Nanofabrication (MEMS)

Explores photomask creation, exposure methods, direct laser writing, resolution, and resist development in MEMS applications.

Physical Vapor Deposition: Evaporation Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores Physical Vapor Deposition techniques, including shadowing effects and equipment specifications for evaporation processes in micro and nanofabrication.

Film Growth: Growth Modes and Crystal Structure MOOC: Micro and Nanofabrication (MEMS)

Explores growth modes in film growth and crystal structure determination based on materials used.

Surface Profiling Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores surface profiling techniques like white light interferometry and laser beam profiling, emphasizing their non-contact nature and high resolution.

Inspection and Metrology: Electron Microscopy MOOC: Micro and Nanofabrication (MEMS)

Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.

Sputtering Techniques: PVD4, DC, RF MOOC: Micro and Nanofabrication (MEMS)

Explores DC, RF, and Magnetron sputtering techniques in Micro and Nanofabrication.

Ion Beam Etching MOOC: Micro and Nanofabrication (MEMS)

Introduces ion beam etchers, combining physical sputtering with chemical activity.

CVD: Theoretical Concepts and Boundary Layers MOOC: Micro and Nanofabrication (MEMS)

Explores theoretical concepts in CVD, focusing on boundary layers and the Reynolds number.

Electron Beam Lithography: Tool Overview MOOC: Micro and Nanofabrication (MEMS)

Explores Electron Beam Lithography (EBL), its tool overview, vacuum levels, electron sources, and guns for sub-20 nm feature fabrication.

Inspection and Metrology: Electrical Characterization of Thin Films MOOC: Micro and Nanofabrication (MEMS)

Explores the evaluation of thin film quality and resistance using metrology techniques.

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