Lecture

Industrial Plasmas: Sheath Formation and Plasma Etching

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In course

PHYS-424: Plasma II

This course completes the knowledge in plasma physics that students have acquired in the previous two courses, with a discussion of different applications, in the fields of magnetic confinement and controlled fusion, astrophysical and space plasmas, and so ...

Description

This lecture covers the formation of industrial plasmas, focusing on sheath development and plasma etching processes. Topics include the transition from Townsend discharge to plasma glow, Maxwell-Boltzmann distribution, ion flux, sheath potential, and density profiles. The instructor explains the importance of using AC for continuous plasma processing, the basics of radio-frequency plasma, and large area RF capacitively-coupled reactors. Furthermore, the lecture delves into Plasma-Enhanced Chemical Vapour Deposition (PECVD) of thin film silicon, Dielectric Barrier Discharge (DBD) for ozone production, and the ozone production process by plasma chemistry. The session concludes with a summary of plasma with insulating electrodes, emphasizing RF capacitively-coupled plasma and Dielectric Barrier Discharge for ozone generation.

Instructor

Holger Reimerdes

Teaching & PhD PhD Students Martim Zurita, Marta Pedrini, Benjamin Yong Kwak Brown, Pierre Louis Sintre, Massimo Carpita, Richard Alexander David Ducker, Giuseppe Iunior Drago Past EPFL PhD Students Mirko Wensing, Claudia Colandrea, Guang-Yu Sun Past EPFL PhD Students as codirector Gustavo Paganini Canal, Joyeeta Sinha, Roberto Maurizio Courses Control and Operation of Tokamaks PHYS-748 This course treats the main issues in operation and control of a tokamak. Control-oriented models are de

Official source

Ontological neighbourhood

Physics

Electromagnetism: Topics in electromagnetism

Related concepts (32)

Plasma (physics)

Plasma () is one of four fundamental states of matter, characterized by the presence of a significant portion of charged particles in any combination of ions or electrons. It is the most abundant form of ordinary matter in the universe, being mostly associated with stars, including the Sun. Extending to the rarefied intracluster medium and possibly to intergalactic regions, plasma can be artificially generated by heating a neutral gas or subjecting it to a strong electromagnetic field.

Plasma etching

Plasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (plasma) of an appropriate gas mixture being shot (in pulses) at a sample. The plasma source, known as etch species, can be either charged (ions) or neutral (atoms and radicals). During the process, the plasma generates volatile etch products at room temperature from the chemical reactions between the elements of the material etched and the reactive species generated by the plasma.

Glow discharge

A glow discharge is a plasma formed by the passage of electric current through a gas. It is often created by applying a voltage between two electrodes in a glass tube containing a low-pressure gas. When the voltage exceeds a value called the striking voltage, the gas ionization becomes self-sustaining, and the tube glows with a colored light. The color depends on the gas used. Glow discharges are used as a source of light in devices such as neon lights, cold cathode fluorescent lamps and plasma-screen televisions.

Electric discharge

In electromagnetism, an electric discharge is the release and transmission of electricity in an applied electric field through a medium such as a gas (ie., an outgoing flow of electric current through a non-metal medium). The properties and effects of electric discharges are useful over a wide range of magnitudes. Tiny pulses of current are used to detect ionizing radiation in a Geiger–Müller tube. A low steady current can be used to illustrate the spectrum of gases in a gas-filled tube.

Plasma actuator

Plasma actuators are a type of actuator currently being developed for aerodynamic flow control. Plasma actuators impart force in a similar way to ionocraft. Plasma flows control has drawn considerable attention and been used in boundary layer acceleration, airfoil separation control, forebody separation control, turbine blade separation control, axial compressor stability extension, heat transfer and high-speed jet control.

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