Lecture

Plasma Physics: Sheaths and Etching

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Description

This lecture covers the formation of plasma from Townsend discharge to glow and arcs, explaining the transition from non-self-sustaining to self-sustaining discharges. It delves into the creation of sheaths, discussing the ion and electron thermal fluxes, plasma-wall interactions, and the equilibrium of ion and electron fluxes to the wall. The lecture also explores the applications of plasma etching, highlighting the importance of directional ion flux for anisotropic etching crucial in modern integrated circuit manufacturing.

In MOOC

Plasma Physics: Applications

This physics course, taught by world-renowned experts in the field, will provide you with an overview of applications in plasma physics. From the study of far distant astrophysical objects, over diverse applications in industry and medicine, to the ultimate goal of sustainable electricity generation from nuclear fusion. In the first part of this course, you will learn how nuclear fusion powers our Sun and the stars in the Universe. You will explore the cyclic variation of the Sun’s activity, how plasma flo

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Related concepts (32)

Plasma etching

Plasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (plasma) of an appropriate gas mixture being shot (in pulses) at a sample. The plasma source, known as etch species, can be either charged (ions) or neutral (atoms and radicals). During the process, the plasma generates volatile etch products at room temperature from the chemical reactions between the elements of the material etched and the reactive species generated by the plasma.

Glow discharge

A glow discharge is a plasma formed by the passage of electric current through a gas. It is often created by applying a voltage between two electrodes in a glass tube containing a low-pressure gas. When the voltage exceeds a value called the striking voltage, the gas ionization becomes self-sustaining, and the tube glows with a colored light. The color depends on the gas used. Glow discharges are used as a source of light in devices such as neon lights, cold cathode fluorescent lamps and plasma-screen televisions.

Electric discharge

In electromagnetism, an electric discharge is the release and transmission of electricity in an applied electric field through a medium such as a gas (ie., an outgoing flow of electric current through a non-metal medium). The properties and effects of electric discharges are useful over a wide range of magnitudes. Tiny pulses of current are used to detect ionizing radiation in a Geiger–Müller tube. A low steady current can be used to illustrate the spectrum of gases in a gas-filled tube.

Plasma (physics)

Plasma () is one of four fundamental states of matter, characterized by the presence of a significant portion of charged particles in any combination of ions or electrons. It is the most abundant form of ordinary matter in the universe, being mostly associated with stars, including the Sun. Extending to the rarefied intracluster medium and possibly to intergalactic regions, plasma can be artificially generated by heating a neutral gas or subjecting it to a strong electromagnetic field.

Etching (microfabrication)

Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.

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