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Lecture

Sheaths and Plasma Etching

Description

This lecture covers topics related to sheaths and plasma etching, including sheath potential and density profiles, ion flux across a collisionless sheath, Bohm criterion, ion and electron densities, Poisson's equation in the sheath, and Bohm's consequences on ion velocity, ion flux, etch rate, and ion bombardment energy.

In MOOC

Plasma Physics: Applications

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Related concepts (32)

Plasma (physics)

Plasma () is one of four fundamental states of matter, characterized by the presence of a significant portion of charged particles in any combination of ions or electrons. It is the most abundant form of ordinary matter in the universe, being mostly associated with stars, including the Sun. Extending to the rarefied intracluster medium and possibly to intergalactic regions, plasma can be artificially generated by heating a neutral gas or subjecting it to a strong electromagnetic field.

Debye sheath

The Debye sheath (also electrostatic sheath) is a layer in a plasma which has a greater density of positive ions, and hence an overall excess positive charge, that balances an opposite negative charge on the surface of a material with which it is in contact. The thickness of such a layer is several Debye lengths thick, a value whose size depends on various characteristics of plasma (e.g. temperature, density, etc.). A Debye sheath arises in a plasma because the electrons usually have a temperature on the order of magnitude or greater than that of the ions and are much lighter.

Fusion power

Fusion power is a proposed form of power generation that would generate electricity by using heat from nuclear fusion reactions. In a fusion process, two lighter atomic nuclei combine to form a heavier nucleus, while releasing energy. Devices designed to harness this energy are known as fusion reactors. Research into fusion reactors began in the 1940s, but as of 2023, no device has reached net power. Fusion processes require fuel and a confined environment with sufficient temperature, pressure, and confinement time to create a plasma in which fusion can occur.

Fusion energy gain factor

A fusion energy gain factor, usually expressed with the symbol Q, is the ratio of fusion power produced in a nuclear fusion reactor to the power required to maintain the plasma in steady state. The condition of Q = 1, when the power being released by the fusion reactions is equal to the required heating power, is referred to as breakeven, or in some sources, scientific breakeven. The energy given off by the fusion reactions may be captured within the fuel, leading to self-heating.

Inertial confinement fusion

Inertial confinement fusion (ICF) is a fusion energy process that initiates nuclear fusion reactions by compressing and heating targets filled with fuel. The targets are small pellets, typically containing deuterium (2H) and tritium (3H). Energy is deposited in the target's outer layer, which explodes outward. This produces a reaction force in the form of shock waves that travel through the target. The waves compress and heat it. Sufficiently powerful shock waves generate fusion.

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