Explores the evolution of micro and nanoengineering, focusing on the use of silicon as a mechanical material and the application of AFM and T-SPL in nanoengineering.
Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.
Explores high-resolution 3D printing techniques, including two-photon polymerization and holographic printing, for creating complex structures with submicrometer precision.
Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.