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Lecture

Advanced SEM Technologies and Examples

In course

MSE-636: Organic semiconductors

Description

This lecture covers the latest generation of scanning electron microscopy (SEM) technologies, including low voltage, high resolution imaging, field emission gun monochromators, and various detectors. It explores lens designs, beam boosters, and beam deceleration techniques, as well as the observation of non-metallic samples with reduced beam damage. The presentation also delves into immersion lenses, in-lens and semi-in-lens configurations, and the detection of secondary electrons and backscattered electrons. The instructor showcases examples of contrast reversal at low voltages, the effects of charging, and the importance of specimen preparation for analytical SEM. The lecture concludes with a discussion on the analytical capabilities of SEM, such as energy-dispersive X-ray spectroscopy (EDX) and electron backscatter diffraction (EBSD).

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Instructor

Frank Nüesch

Official source

Ontological neighbourhood

Industrial and production engineering

Manufacturing engineering: Electron-beam technology

Related concepts (32)

Scanning electron microscope

A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample. The electron beam is scanned in a raster scan pattern, and the position of the beam is combined with the intensity of the detected signal to produce an image.

Electron microscope

An electron microscope is a microscope that uses a beam of electrons as a source of illumination. They use electron optics that are analogous to the glass lenses of an optical light microscope. As the wavelength of an electron can be up to 100,000 times shorter than that of visible light, electron microscopes have a higher resolution of about 0.1 nm, which compares to about 200 nm for light microscopes.

Field electron emission

Field electron emission, also known as field emission (FE) and electron field emission, is emission of electrons induced by an electrostatic field. The most common context is field emission from a solid surface into a vacuum. However, field emission can take place from solid or liquid surfaces, into a vacuum, a fluid (e.g. air), or any non-conducting or weakly conducting dielectric. The field-induced promotion of electrons from the valence to conduction band of semiconductors (the Zener effect) can also be regarded as a form of field emission.

Particle detector

In experimental and applied particle physics, nuclear physics, and nuclear engineering, a particle detector, also known as a radiation detector, is a device used to detect, track, and/or identify ionizing particles, such as those produced by nuclear decay, cosmic radiation, or reactions in a particle accelerator. Detectors can measure the particle energy and other attributes such as momentum, spin, charge, particle type, in addition to merely registering the presence of the particle.

Signal

In signal processing, a signal is a function that conveys information about a phenomenon. Any quantity that can vary over space or time can be used as a signal to share messages between observers. The IEEE Transactions on Signal Processing includes audio, video, speech, , sonar, and radar as examples of signals. A signal may also be defined as observable change in a quantity over space or time (a time series), even if it does not carry information.

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