Lecture

Silicon Etching Techniques

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In course

NX-422: Neural interfaces

Neural interfaces (NI) are bioelectronic systems that interface the nervous system to digital technologies. This course presents their main building blocks (transducers, instrumentation & communication), reviews current and upcoming materials and technolog ...

Description

This lecture covers various silicon etching techniques, including wet etching with examples like KOH, and dry etching methods such as reactive ion etching (RIE). It also discusses the fabrication process of the Utah array, detailing steps like backside dicing, glassing, grinding, and metallization. Additionally, impedance spectra measurements for in vitro and in vivo electrodes are presented, showing an impedance increase for frequencies above 1kHz. The lecture concludes with a study on active silicon probes, specifically Neuropixel, for recording neural activity in rats' brains.

Instructors (2)

Stéphanie Lacour

Stéphanie P. Lacour holds the Bertarelli Foundation Chair in Neuroprosthetic Technology in the School of Engineering at EPFL and leads the Laboratory for Soft Bioelectronic Interfaces. She received her PhD in Electrical Engineering from INSA de Lyon, France, and completed postdoctoral research at Princeton University and the University of Cambridge. She is the recipient of the 2006 MIT TR35, a University Research Fellowship of the Royal Society, European Research Council ERC Starting and POC Grants, and a SNSF-ERC Consolidator Grant. She was elected a 2015 Young Global Leader by the World Economic Forum.

Mahsa Shoaran

Official source

Ontological neighbourhood

Biology

Neuroscience: Computational neuroscience

Related concepts (30)

Reactive-ion etching

Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High-energy ions from the plasma attack the wafer surface and react with it. A typical (parallel plate) RIE system consists of a cylindrical vacuum chamber, with a wafer platter situated in the bottom portion of the chamber.

Etching (microfabrication)

Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.

Neural oscillation

Neural oscillations, or brainwaves, are rhythmic or repetitive patterns of neural activity in the central nervous system. Neural tissue can generate oscillatory activity in many ways, driven either by mechanisms within individual neurons or by interactions between neurons. In individual neurons, oscillations can appear either as oscillations in membrane potential or as rhythmic patterns of action potentials, which then produce oscillatory activation of post-synaptic neurons.

Neural decoding

Neural decoding is a neuroscience field concerned with the hypothetical reconstruction of sensory and other stimuli from information that has already been encoded and represented in the brain by networks of neurons. Reconstruction refers to the ability of the researcher to predict what sensory stimuli the subject is receiving based purely on neuron action potentials. Therefore, the main goal of neural decoding is to characterize how the electrical activity of neurons elicit activity and responses in the brain.

Neural coding

Neural coding (or neural representation) is a neuroscience field concerned with characterising the hypothetical relationship between the stimulus and the individual or ensemble neuronal responses and the relationship among the electrical activity of the neurons in the ensemble. Based on the theory that sensory and other information is represented in the brain by networks of neurons, it is thought that neurons can encode both digital and analog information.

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