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Concept

Electron-beam physical vapor deposition

Related lectures (32)

Physical Vapor Deposition: Basics and Applications MOOC: Micro and Nanofabrication (MEMS)

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

PVD 7: Other Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Electron Beam Deposition: EBDM-DMD

Explores Electron Beam Deposition Manufacturing and Direct Metal Deposition processes, highlighting their equipment, advantages, and limitations.

Thin Film Growth: Mechanisms and Applications

Explores thin film growth mechanisms, organic thin film considerations, deposition techniques, and patterning for electronic devices.

Physical Vapor Deposition: Evaporation Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores Physical Vapor Deposition techniques, including shadowing effects and equipment specifications for evaporation processes in micro and nanofabrication.

Thin Films: Deposition and Patterning

Explores thin film preparation, growth mechanisms, and patterning techniques for organic electronic devices.

Sputtering: Ion Target Interactions MOOC: Micro and Nanofabrication (MEMS)

Examines ion-target interactions in PVD sputtering processes, covering compound deposition, surface damage, and factors influencing target ejection rates.

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.

Thin-Film Processing: Deposition Techniques

Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.

Thermal Evaporation Process MOOC: Micro and Nanofabrication (MEMS)

Explains the thermal evaporation process in a vacuum chamber for micro-nano fabrication.

Gas Transport and Film Growth Rate MOOC: Micro and Nanofabrication (MEMS)

Covers mass transport in the boundary layer, gas transfer to the substrate, film growth rate calculation, and experimental results.

Thin Film Growth: Atoms Arrival and Adhesion MOOC: Micro and Nanofabrication (MEMS)

Delves into thin film growth, adhesion, crystal structure, and stresses.

Stress in Thin Films: Film Growth and Microfabrication MOOC: Micro and Nanofabrication (MEMS)

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Physical Vapor Deposition: Principles and Applications

Explores the principles and applications of Physical Vapor Deposition (PVD) in microfabrication technologies, covering topics like metal microstructure creation and sputtering efficiency.

Sputtering: Plasma Formation and Thin Film Deposition MOOC: Micro and Nanofabrication (MEMS)

Covers sputtering, plasma creation, and thin film deposition processes.

Plasma Focused Ion Beam: Applications and Techniques

Explores Plasma Focused Ion Beam technology, covering high-precision imaging, material deposition, and automated system checks.

Sputtering: Film Growth and Control Parameters MOOC: Micro and Nanofabrication (MEMS)

Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

Organic Thin Film Growth

Explores organic thin film growth methods, nucleation, grain growth, crystal alignment, and solvent vapor annealing.

Chemical Vapor Deposition: Oxide Formation and ALD MOOC: Micro and Nanofabrication (MEMS)

Explores CVD processes for oxide formation and ALD in micro and nanofabrication.

Chemical Vapor Deposition: Fundamentals and Techniques

Covers the fundamentals and techniques of Chemical Vapor Deposition (CVD), including mass transfer, film growth rate calculation, and various CVD techniques.