Publication

Shear mode bulk acoustic wave resonator based on c-axis oriented AIN thin film

Publications associées (29)

Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

Paul Muralt, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

In this work, bar- and disk-shaped resonators were fabricated using Al(0.8)4Sc(0.16)N thin film Sensitivity analysis of the resonators' resonance frequencies with respect to the piezoelectric material parameters revealed that resonance analysis can be used ...

IEEE2018

A concept of wireless and passive very-high temperature sensor

Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai

There is a need for sensors capable operating at temperatures above 1000 degrees C. We describe an innovative sensor that might achieve this goal. The sensor comprises two main elements: a thermocouple and a surface acoustic wave (SAW) strain sensor. The c ...

Amer Inst Physics2017

Micromechanical resonators with sub-micron gaps filled with high-k dielectrics

Mariazel de la Candelas Maqueda López

Scaled microelectromechanical (MEMS) resonating devices have generated a great interest for their use in RF front-end architectures for wireless communication, channel-select filters, on-chip signal processing and timing and extreme mas sensing application ...

EPFL2017

Critical thickness of GaN on AlN: impact of growth temperature and dislocation density

Denis Martin, Nicolas Grandjean, Pirouz Sohi

Critical thickness and strain relaxation of c-plane GaN layers grown by molecular beam epitaxy on AlN were studied as a function of growth temperature and threading dislocation density (TDD). For this purpose we used AlN/sapphire templates and AlN single c ...

2017

Acoustic dispersive prism

Juan Ramon Mosig, Hervé Lissek, Seyyed Hussein Seyyed Esfahlani, Sami Driss Karkar

The optical dispersive prism is a well-studied element, which allows separating white light into its constituent spectral colors, and stands in nature as water droplets. In analogy to this definition, the acoustic dispersive prism should be an acoustic dev ...

Nature Research2016

Piezoelectric response of BiFeO3 ceramics at elevated temperatures

Dragan Damjanovic

The high Curie temperature (T-C similar to 825 degrees C) of BiFeO3 has made this material potentially attractive for the development of high-T-C piezoelectric ceramics. Despite significant advances in the search of new BiFeO3-based compositions, the piezo ...

AIP American Institute of Physics2016

Hybrid BAW/SAW AlN and AlScN Thin Film Resonator First Experimental data

Paul Muralt, Sylvain Ballandras, Ramin Matloub Aghdam, Vladimir Pashchenko

A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire subst ...

Ieee2016

Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

Paul Muralt, Nachiappan Chidambaram, Ramin Matloub Aghdam, Andrea Mazzalai, Davide Balma

A measurement setup for the detailed study of the transverse piezoelectric coefficient e(31,f) in the converse (actuator) mode was developed. It allows the assessment of the piezoelectric stress in thin films on silicon cantilevers and provides for a corre ...

Institute of Electrical and Electronics Engineers2015