Shear mode bulk acoustic wave resonator based on c-axis oriented AIN thin film

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Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

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Shear mode bulk acoustic wave resonator based on c-axis oriented AIN thin film

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