Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

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Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by f ...

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Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

Chattez avec Graph Search

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