NbN films with high kinetic inductance for high-quality compact superconducting resonators

Niobium nitride (NbN) is a particularly promising material for quantum technology applications, as it shows the degree of reproducibility necessary for large-scale superconducting circuits. We demonstrate that resonators based on NbN thin films present a one-photon internal quality factor above 105 maintaining a high impedance (larger than 2kΩ), with a footprint of approximately 50×100μm2 and a Kerr nonlinearity of few tenths of a hertz. These quality factors, mostly limited by losses induced by the coupling to two-level systems, have been maintained for kinetic inductances ranging from tenths to hundreds of picoHenry per square. We also demonstrate minimal variations in the performance of the resonators during multiple cooldowns over more than nine months. Our work proves the versatility of niobium nitride high-kinetic-inductance resonators, opening perspectives towards the fabrication of compact, high-impedance, and high-quality multimode circuits, with sizable interactions.