Effect of fluoride plasma treatment on InAlN/GaN HEMTs

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A review. Fluorine remains an insiders' tip in the life sciences as it enables the fine-tuning of biol. properties. However, the synthesis of fluorine-substituted target compds. is not always trivial. Virtually any fluorine atom attached to an org. backbon ...

Effect of fluoride plasma treatment on InAlN/GaN HEMTs

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