Coherent Spin Waves in Curved Ferromagnetic Nanocaps of a 3D‐Printed Magnonic Crystal

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Recently electrically conducting SPM probes were used as read/write sensor of magneto-resistive nanopillars and ferroelectric domains in the development of >1 Tb/inch2 data storage. Since metal coated (platinum (Pt) or Pt/iridium) silicon (Si) probes are not suitable at high current densities, probes with an entire metallic tip form a solution. We present the fabrication and characterisation of hybrid SPM probes with fully metallic cantilever and tip. One method is based on a backside opening etch in KOH so

The endeavour to develop nanodevices demands for patterning methods in the nanoscale. To bring nanodevices to the market, there is a need for fast, low-cost replication nanopatterning methods. In addition, an increased flexibility of the nanopatterning methods is important for the engineering of multimaterial and multifunctional nano/micro-electro-mechanical systems (NEMS/MEMS), such as polymer-based electronic and sensor devices, 3D microfluidic systems, and bio-analytical systems. A series of alternative,

The evaporation through shadow masks (nanostencils) overcomes the limitations typically given by the patterning methods involving conventional optical lithography and etching, such as diffraction limits and etch-selectivity. It allows making low-cost nanopatterns on arbitrary surfaces, and furthermore enables large-scale manufacturing. This paper demonstrates the fabrication of metal cantilevers with sub-micron dimensions using direct evaporation through the miniature nanostencils and followed by dry etchin

Deposition of a hydrothermal method has a number of advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure, and a large thickness. The present paper investigates the improvement of an epitaxial lead zirconate titanate (PZT) thin film deposited via hydrothermal synthesis. The critical parameter contributing to the film morphology was revealed to be the holding position of the reaction solution during deposition. In addition to this improvement, the SrRuO3 bottom elec

Oriented films of tetracene and pentacene have been obtained by high vacuum sublimation onto oriented poly(tetrafluoroethylene) (PTFE) substrates. Polymorphism, orientation, and morphology of the pentacene and tetracene films are studied as a function of deposition parameters [substrate temperature (Ts), deposition time (t), and deposition rate (τ)] using X-ray and electron diffraction, transmission and scanning electron microscopies and atomic force microscopy (AFM). Oriented films of the tr

A rapid and simple method to fabricate tiny shadow-masks and their use in multi-layer surface patterning with in situ micromechanical alignment is presented. Instead of using silicon micromachining with through-wafer etching to define the thin membrane with etched apertures, we are using photoplastic SU-8-based resist as structural material of both membrane and support rim. Two layers, 5 and 150um thick, are structured by lithography and finally released from the surface. The free-standing SU-8 membranes ha

Uniaxial fragmentation tests were carried out in situ in a scanning electron microscope (SEM) on 10-nm-thick silicon oxide coatings deposited by plasma enhanced chemical vapor deposition on poly(ethylene terephthalate). In order to prevent charging effects due to the isolating nature of the oxide surface, an additional conductive gold layer was sputtered onto the coating prior to its tensile loading in the SEM chamber. The gold layer was shown not to affect initiation of tensile failure of the oxide coating

Ferroelectric capacitive devices for memory and MEMS applications require patterned ferroelectric thin films with high anisotropic etched features. In this paper, physical and chemical parameters during etching of Pb(Zr0.53Ti0.47)O-3 (PZT) by a dual frequency ECR/RF reactor have been investigated. The removal characteristics of blanket films and films with a patterned mask were investigated as a function of gas chemistry (Ar, halogen gases), substrate bias RF power and working pressure (from 5 x 10(-4) Pa t

Crystalline diamond coatings and, increasingly, diamond-like amorphous carbon (DLC) films are used for tribological and protective layers for their hardness and chemical inertness. They are also under investigation for their electron emitting properties, with possible applications in field emission displays. In this study, hydrogen-free DLC films were deposited by laser ablation using a KrF excimer laser and fluences between 0.5 and 2 J/cm(2). Information about the disorder and short range order in the film

This study presents two techniques of structuration of type UV-LIGA (Lithographie, Galvanisierung und Abformung) based on the use of two thick photoresists which are a dry film resist called Riston® from DuPont and the new SU-8 negative-working resist from IBM. The relating processes to the structuration of these photoresists and some applications are presented too. The minimal resolution of the Riston® films has been found to be 30 µm for lines and trenches, and 40 µm for isolated holes in a 50 µm-thick fi

Platinum silicide films are widely used in silicon devices for ohmic and Schottky contacts. It has been demonstrated in the recent years that Schottky barriers employing ultra-thin platinum silicide films (thickness < 10 nm) are useful for photodetection in the near infrared. We have studied the formation of thin platinum silicide films and their electrical properties as a function of the annealing temperature in presence of an interfacial native silicon oxide layer and with plasma etching damage on the Si

Fiber optic modulators were fabricated by coating optical fibers with electrode and piezoelectric ZnO layers. The techniques of piezoelectric fiber optic modulator (PFOM) fabrication are presented, and the microstructure and crystallographic texture of the coatings are analyzed, Ln order to produce thick (approximately 5 mu m) ZnO coatings, it was necessary to study the reactive de magnetron sputtering process in O-2/Ar gas mixtures under conditions close to the transition between an oxidized and nonoxidize

Coherent Spin Waves in Curved Ferromagnetic Nanocaps of a 3D‐Printed Magnonic Crystal

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Full tungsten and platinum nanoprobes for electrically conducting scanning probe methods

Advancing towards well-controlled full-wafer nanostencil lithography

Fabrication and characterization of metal nanolevers made by shadow mask technology

Ferroelectric properties of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method below the Curie temperature

Orienting tetracene and pentacene thin films onto friction-transferred poly(tetrafluoroethylene) substrate

All-photoplastic microstencil with self-alignment for multiple layer shadow-mask patterning

Mechanical analysis of ultrathin oxide coatings on polymer substrates in-situ in a scanning electron microscope

Mechanisms of Pb(Zr0.53Ti0.47)O-3 thin film etching with ECR/RF reactor

Characterization of diamond-like carbon by Raman spectroscopy, XPS and optical constants

Nouvelles technologies de microstructuration de type UV-LIGA et fabrication de composants micromécaniques

Formation and properties of nanometer-thick platinum silicide layers

Fabrication and structural analysis of ZnO coated fiber optic phase modulators