Publications de Niels Quack | EPFL Graph Search

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MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2 pi phase shifter with a 1.54 mu s time constant and 0.5 dB insertion loss in IMEC's iSiPP5OG platform. ...

The European Conference on Optical Communications (ECOC) is one of the leading conferences in the field of optical communications and its related topics. The 48th edition took place from 18th-22nd September 2022 in Basel, Switzerland. The conference attrac ...

We demonstrate a die level release process for silicon photonic MEMS structures, that is compatible with dies from a standard silicon photonics foundry process which are only several square millimeters in size. ...

Quantum metrology enables some of the most precise measurements. In the life sciences, diamond-based quantum sensing has led to a new class of biophysical sensors and diagnostic devices that are being investigated as a platform for cancer screening and ult ...

We present a vertically movable silicon photonic MEMS switch realized in IMEC's standard silicon photonics platform followed by a dedicated postprocessing for MEMS release. The device has six optical ports, which enable four switching configurations with a ...

Large-scale (50x50 and 64x64) integrated photonic switches have been realized by combining silicon photonics with efficient micro-electro-mechanical-system (MEMS) switching mechanisms. Low on-chip loss (0.058dB/port) and sub-microsecond switching time have ...

Recent advances in integration of Nano-Opto-Electromechanical Systems in Silicon Photonics enable fundamental photonic operations such as switching, phase shifting or power equalization on-chip. The unique combination of high optical efficiency, low electr ...

We report freestanding silicon photonic ring and disk resonators fabricated in a simplified silicon photonics process based on IMEC's iSiPP5OG standard platform that have been released by a custom MEMS post-processing step. Experimental results show high o ...

We present our work in the European project MORPHIC to extend an established silicon photonics platform with low-power and non-volatile micro-electromechanical (MEMS) actuators to demonstrate large-scale programmable photonic integrated circuits (PICs). ...

MEMS offer low power tunability to silicon photonics. However, reported phase shifters lack in range, IL, or linearity. We show pi linear phase shift in compact, 0.2 dB-IL MEMS devices, and demonstrate trade-offs for scalability. (C) 2020 The Author(s) ...

We present an arbitrary 8x8 beam pattern projection system based on a programmable grating coupler array with a Fourier lens. The static power consumption and the reconfiguration time are below 1 mu W and 10 mu s, respectively. (C) 2021 The Author(s) ...

Reconfigurable optical gates control power and phase in programmable photonic circuits. However, state-of-the-art optical gates are power-hungry due to using heaters and large due to using Mach-Zehnder Interferometers. Here, we demonstrate a compact low-po ...

Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry pla ...

We demonstrate a compact add-drop filter based on a MEMS ring resonator implemented in IMEC's iSiPP50G silicon photonics platform. The device exhibits a port extinction of 20 dB and a port isolation of > 50 dB, upon actuation range of 0 V to 27 V. ...

We report on a 4-bit digital silicon photonic MEMS phase-shifter with sub-microsecond switching time and low power consumption (< 10 uW). The device consists of 4 digitally switched phase-shifting units, which in total enable phase shift from pi/8 to 15pi/ ...

Polishing method comprising the steps of: - providing at least one crystalline layer or substrate, the at least one crystalline layer or substrate extending in at least one plane, and including at least one outer surface and at least one depression extendi ...

Niels Quack

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Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform

Editorial Foreword to The ECOC 2022 Special Issue

Die Level Release of Silicon Photonic MEMS

Biocompatible surface functionalization architecture for a diamond quantum sensor

Low-Voltage Silicon Photonic Mems Switch With Vertical Actuation

Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

Large-Scale Silicon Photonic Switches

Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics

Freestanding Silicon Photonic Ring and Disk Resonators

MORPHIC: MEMS enhanced silicon photonics for programmable photonics

Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

8x8 Programmable Multi-Beam Pattern Projection Based on Multicast Silicon Photonic MEMS Switches

A compact 2 × 2 optical gate using a silicon photonic MEMS dual-drive directional coupler

A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits

Silicon Photonic MEMS Add-Drop Filter

Digital Silicon Photonic MEMS Phase-Shifter

Non-contact polishing of a crystalline layer or substrate by ion beam etching

64x64 Low-Loss and Broadband Digital Silicon Photonic MEMS Switches

Towards High Frequency 3D Magnetic Resonators Exploring Microfabricated Bimorph Cantilever Structures