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Niels Quack

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Publications associées (77)

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Editorial Foreword to The ECOC 2022 Special Issue

Hans Georg Limberger, Niels Quack, Rachel Grange

The European Conference on Optical Communications (ECOC) is one of the leading conferences in the field of optical communications and its related topics. The 48th edition took place from 18th-22nd September 2022 in Basel, Switzerland. The conference attrac ...

IEEE Institute of Electrical and Electronics Engineers2023

Die Level Release of Silicon Photonic MEMS

Niels Quack, Teodoro Graziosi

We demonstrate a die level release process for silicon photonic MEMS structures, that is compatible with dies from a standard silicon photonics foundry process which are only several square millimeters in size. ...

IEEE2016

Biocompatible surface functionalization architecture for a diamond quantum sensor

Niels Quack, Adrien Marc Toros

Quantum metrology enables some of the most precise measurements. In the life sciences, diamond-based quantum sensing has led to a new class of biophysical sensors and diagnostic devices that are being investigated as a platform for cancer screening and ult ...

National Academy of Sciences2022

Low-Voltage Silicon Photonic Mems Switch With Vertical Actuation

Niels Quack, Hamed Sattari, Alain Yuji Takabayashi

We present a vertically movable silicon photonic MEMS switch realized in IMEC's standard silicon photonics platform followed by a dedicated postprocessing for MEMS release. The device has six optical ports, which enable four switching configurations with a ...

IEEE2021

Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

Niels Quack, Pascal Gallo, Teodoro Graziosi, Marcell Kristof Kiss, Sichen Mi, Adrien Marc Toros, Mehdi Naamoun

2020

Large-Scale Silicon Photonic Switches

Niels Quack

Large-scale (50x50 and 64x64) integrated photonic switches have been realized by combining silicon photonics with efficient micro-electro-mechanical-system (MEMS) switching mechanisms. Low on-chip loss (0.058dB/port) and sub-microsecond switching time have ...

Ieee2016

Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

Niels Quack, Teodoro Graziosi, Sichen Mi

2018

Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari

Recent advances in integration of Nano-Opto-Electromechanical Systems in Silicon Photonics enable fundamental photonic operations such as switching, phase shifting or power equalization on-chip. The unique combination of high optical efficiency, low electr ...

IEEE2021

Freestanding Silicon Photonic Ring and Disk Resonators

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari, Yu Zhang

We report freestanding silicon photonic ring and disk resonators fabricated in a simplified silicon photonics process based on IMEC's iSiPP5OG standard platform that have been released by a custom MEMS post-processing step. Experimental results show high o ...

IEEE2019

MORPHIC: MEMS enhanced silicon photonics for programmable photonics

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari

We present our work in the European project MORPHIC to extend an established silicon photonics platform with low-power and non-volatile micro-electromechanical (MEMS) actuators to demonstrate large-scale programmable photonic integrated circuits (PICs). ...

SPIE-INT SOC OPTICAL ENGINEERING2022

Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari

MEMS offer low power tunability to silicon photonics. However, reported phase shifters lack in range, IL, or linearity. We show pi linear phase shift in compact, 0.2 dB-IL MEMS devices, and demonstrate trade-offs for scalability. (C) 2020 The Author(s) ...

IEEE2020

8x8 Programmable Multi-Beam Pattern Projection Based on Multicast Silicon Photonic MEMS Switches

Niels Quack

We present an arbitrary 8x8 beam pattern projection system based on a programmable grating coupler array with a Fourier lens. The static power consumption and the reconfiguration time are below 1 mu W and 10 mu s, respectively. (C) 2021 The Author(s) ...

IEEE2021

A compact 2 × 2 optical gate using a silicon photonic MEMS dual-drive directional coupler

Niels Quack, Alain Yuji Takabayashi

Reconfigurable optical gates control power and phase in programmable photonic circuits. However, state-of-the-art optical gates are power-hungry due to using heaters and large due to using Mach-Zehnder Interferometers. Here, we demonstrate a compact low-po ...

SPIE2025

A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits

Niels Quack, Alain Yuji Takabayashi

Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry pla ...

Optical Society of America2023

Silicon Photonic MEMS Add-Drop Filter

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari

We demonstrate a compact add-drop filter based on a MEMS ring resonator implemented in IMEC's iSiPP50G silicon photonics platform. The device exhibits a port extinction of 20 dB and a port isolation of > 50 dB, upon actuation range of 0 V to 27 V. ...

IEEE2021

Digital Silicon Photonic MEMS Phase-Shifter

Niels Quack

We report on a 4-bit digital silicon photonic MEMS phase-shifter with sub-microsecond switching time and low power consumption (< 10 uW). The device consists of 4 digitally switched phase-shifting units, which in total enable phase shift from pi/8 to 15pi/ ...

IEEE2018

Non-contact polishing of a crystalline layer or substrate by ion beam etching

Niels Quack, Teodoro Graziosi, Sichen Mi, Adrien Marc Toros

Polishing method comprising the steps of: - providing at least one crystalline layer or substrate, the at least one crystalline layer or substrate extending in at least one plane, and including at least one outer surface and at least one depression extendi ...

2020