Publications de Benjamin Strahm

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The constant energy consumption and world-wide demography expansion add to the potential risks of ecological and human disaster associated with global warming. This makes it a necessity to develop renewable energy technologies such as photovoltaic energy. ...

One of the main challenges for silicon thin film deposition for solar cell applications is to achieve high rate deposition in order to reduce the manufacturing costs. However, when silane and hydrogen are used as precursor gas in parallel plate plasma-enha ...

Plasma diagnostics for large area, industrial RF parallel-plate reactors can be useful for process optimization and monitoring, provided that their implementation is practical and non-intrusive. For instance, Fourier transform infrared (FTIR) absorption sp ...

The optimal plasma parameters for plasma processing, such as deposition of microcrystalline silicon from silane and hydrogen, are generally chosen in steady-state discharge conditions. However, this steady state must be reached in a short time after plasma ...

Cost reduction constraints for microcrystalline silicon thin film photovoltaic solar cells require high deposition rates and high silane gas utilization efficiencies. If the requirements in deposition rate have sometimes been fulfilled, it is generally not ...

This paper reports on the development of an innovative back-contacted crystalline silicon solar cell with passivating contacts featuring an interband tunnel junction at its electron-collecting contacts. In this novel architecture, named "tunnel-IBC", both ...

In large area reactors, a local asymmetry of the electrode area, due to lateral grounded walls, causes a perturbation in rf plasma potential, due to the redistribution of lateral rf current, which propagates along the resistive plasma between capacitive sh ...

In this work, the microstructure transition from amorphous to microcrystalline silicon is defined in terms of the silane concentration in the plasma as opposed to the silane concentration in the input gas flow. In situ Fourier transform infrared absorption ...

Benjamin Strahm

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Investigations of radio-frequency, capacitively-coupled large area industrial reactor : cost-effective production of thin film microcrystalline silicon for solar cells

Powder formation in SiH[sub 4]–H[sub 2] discharge in large area capacitively coupled reactors: A study of the combined effect of interelectrode distance and pressure

Non-intrusive plasma diagnostics for the deposition of large area thin film silicon

Fast equilibration of silane/hydrogen plasmas in large area RF capacitive reactors monitored by optical emission spectroscopy

Optimization of the microcrystalline silicon deposition efficiency

Interdigitated back contact silicon heterojunction solar cells featuring an interband tunnel junction enabling simplified processing

Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive reactors

Uniformity of silicon microcrystallinity in large area RF capacitive reactors

Fast growth of microcrystalline silicon solar cells on LP-CVD ZnO in industrial KAI PECVD reactors

Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H-2 discharges

Optimization of microcrystaline silicon deposition efficiency

Crystallinity Uniformity of Microcrystalline Silicon Thin Films Deposited in Large Area Radio Frequency Capacitively-coupled Reactors

Plasma diagnostics as a tool for process optimization

Investigation of radio-frequency, capacitively-coupled large area industrial reactor: cost-effective production of thin film microcrystalline silicon for solar cells