Publications de Nico de Rooij | EPFL Graph Search

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MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element.

A pyroMEMS igniter with increased combustion reliability is presented. The igniter consisted of a thin-film platinum Joule heater fabricated on a borosilicate glass substrate. Two different igniter layouts (meandering and annular) and three different binde ...

This paper shows the generation of monodisperse PLGA micro-droplets in MFFD made of NOA 81. We also present a theory coupled to the MFFD design capable of predicting the size and frequency of the polymer-droplet formation. Chang. et al. have encapsulated nanoparticles in PLGA droplets [1], while Xu et al. demonstrated the capability of polydimethylsiloxane (PDMS) MFFDs to produce drug-loaded monodisperse PLGA particles and studied their drug release kinetics [2]. However to our knowledge the coupling of the

Polymers like PDMS or SU-8 have become popular for microfluidic applications. We show that modifications of the surface energy are more stable on NOA81 compared to PDMS. A simple method to fabricate a closed all-polymer microfluidic channel showing both hydrophilic and hydrophobic surfaces is presented and the therein handling of a multiphase flow (aqueous solution and organic solvent) is demonstrated.

An innovative technology for the realization of key elements of a microfabricated reduction unit is presented. In view of integrating the functions of gear, pinion and axle into one element, multilevel metal electroplating in a negative dry film resist mould (Riston) is used. Easier processing, inherent planarization for multilevel 3-D structures, vertical sidewalls and high thicknesses (20-50 mu m/level) are shown to be the main key features of dry films. To demonstrate the process feasibility, a gear and

Single panel processing of polymeric microfluidic devices has been widely researched in recent years. However, suitable high throughput roll-to-roll replication methods are still limited. Taking cue from the conventional hot embossing process and roll-to-r ...

We report on the design and fabrication of ultra-low power metal-oxide (MOX) gas sensors on plastic foils envisioning their fabrication at large scale and low cost. A complete sensor solution is presented including its packaging at the foil level and the d ...

We present a new approach of beam homogenizing elements based on a statistical array of concave cylindrical microlens arrays. Those elements are used to diffuse light in only one direction and can be employed together with fly’s eye condensers to generate ...

This communication presents an overview on our activities on the development of printed sensors on flexible polymeric foil for RFID. We are envisioning the direct printing of sensors on different types of products such as smart labels and RFID tags. This t ...

In view of a novel miniature atomic clock with low power consumption, we investigate on the potential for a laserpumped double-resonance atomic clock based on a microfabricated Rb vapor cell. We obtain a clock short-term stability of 2x10-11 τ-1/2 and the stability stays below 1x10-11 up to τ = 104s, which demonstrates the feasibility of the approach.

This paper presents a new fabrication method to manufacture alkali reference cells having dimensions larger than standard micromachined cells and smaller than glass-blown ones. This technology fills a gap in cell sizes and already available technologies.

In multi-object spectrometers, field selectors, which are located in the focal plane of the telescopes, are required for the selection of astronomical objects, such as stars or faint galaxies. We present a two-dimensional micromirror array as a field selec ...

In this study, we introduce five unique scanning vibes developed in our laboratory for different fields of application These probes are the results of excellent collaborations with many external partners Each probe possesses many advanced features that one can hardly obtain with plane probes for conventional optical deflection system The applications of these probes are very versatile. from atomic force microscope for the exploration of Mars to In vivo measurements of human knee cartilage (C) 2010 Institute

Capacitive-based sensing device comprising an organic substrate, a sensing layer and two printed/additively deposited planar electrodes, said sensing layer being separated from the substrate by at least one separating layer. ...

Thin circular piezoelectric energy harvester diaphragms undergoing large deflection in a harsh liquid environment are investigated in this paper. A material set combining AlN as transducer, SiC as electronics, Mo as wiring and Si as holder is considered. A ...

In this contribution we present multi-channel microinjector arrays fabricated by a reliable three-layer SU-8 process and assembled with glutamate biosensor microprobes'. It enables local delivery of specific liquids into brain tissue for the stimulation or ...

A high fill-factor, dual-axis micromirror array with novel spring and actuator design is developed for high thermal load applications. Each pixel can attain an omnidirectional mechanical DC rotation angle of +/- 4 degrees.

We report on the successful development of a well-controlled two-step batch nano-fabrication process to achieve nanometer-size gaps at the wafer scale. The technique is based on an optimized electron-beam lithography process, which enables the fabrication ...

Nico de Rooij

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Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking

PYROMEMS IGNITER BASED ON A TEMPERATURE GRADIENT: CONCEPT, FABRICATION AND CHARACTERIZATION

On the generation of poly(dl-lactide-co-glycolide) (PLGA) particles in microfluidic flow focusing devices (MFFD) made of Norland Optical Adhesives (NOA81)

UV-Curable Glue (NOA81) for Fabrication of a Closed Microfluidic Channel with Hydrophilic and Hydrophobic Surfaces

Low-cost technology for multilayer electroplated parts using laminated dry film resist

Micro-fabrication of polymeric devices using hot roller embossing

Ultra-low power metal oxide gas sensor on plastic foil

Fabrication and characterization of linear diffusers based on concave micro lens arrays

Printed sensors on smart RFID labels for logistics

Laser‐Pumped Double‐Resonance Clock Using a Micro‐Fabricated Cell

Multiple stack anodically bonded 4 mm thick Rb vapor cell

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Advanced Scanning Probes for Micro-Nano Science Researches

Smart RFID Label with a Printed Multisensor Platform for Environmental Monitoring

Printed capacitive sensing device

Design considerations to enhance the performances of thin circular piezoelectric energy harvester diaphragms in harsh liquid environments

Temperature, humidity and gas sensors integrated on plastic foil for low power applications

Simultaneous Chemical Recording and Stimulation in the Brain Using an Assembly of Biosensor Silicon Microprobes and SU-8 Microinjectors

A Dual-Axis High Fill-Factor Micromirror Array for High Thermal Loads

Batch fabrication of gold-gold nanogaps by E-beam lithography and electrochemical deposition