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Concept

Entrance pupil

Publications associées (6)

Spatial coherence properties of an LED-based illumination system for mask-aligner lithography

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Raoul Kirner, Johana Bernasconi

A high-power LED-based illumination system has been developed as a replacement for the mercury arc lamps used in mask-aligner lithography. LEDs are arranged in a grid array and placed in the entrance aperture of individual reflectors. Those reflectors decr ...

SPIE2019

Aberrations analysis of a Focused Plenoptic Camera

Toralf Scharf, Alessandro Grosso

A Focused Plenoptic Camera in Galilean configuration is studied and its aberrations behavior is interpreted with the Nodal Aberration Theory (NAT). Sequential ray tracing is applied to individual optical channels constituted by the camera objective and ind ...

2018

High power modular LED-based illumination system for lithography applications

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Raoul Kirner, Johana Bernasconi

Mask-aligner lithography is a technology used to transfer patterns with critical dimensions in the micrometer range from below 1 micron for contact printing to a dozen of microns in proximity printing. This technology is widely used in the fabrication of M ...

2018

Method and apparatus for head worn display with multiple exit pupils

Christophe Moser, Eric Tremblay

A method for displaying an image viewable by an eye, the image being projected from a portable head worn display, comprises steps of: emitting a plurality of light beams of wavelengths that differ amongst the light beams; directing the plurality of light b ...

2016

Digital confocal microscopy through a multimode fiber

Demetri Psaltis, Christophe Moser, Damien Claude-Marie Loterie, Salma Farahi, Alexandre Goy, Ioannis Papadopoulos

Acquiring high-contrast optical images deep inside biological tissues is still a challenging problem. Confocal microscopy is an important tool for biomedical imaging since it improves image quality by rejecting background signals. However, it suffers from ...

Optical Soc Amer2015

Multi-resonant compact nanoaperture with accessible large nearfields

Hatice Altug, Dordaneh Etezadi

We present a compact and multi-resonant aperture system supporting large local electromagnetic fields, which is highly advantageous for applications demanding high signal-to-noise ratio. The system is composed of subwavelength H-shaped apertures with exten ...

2015