Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding ...
The principles of 3D surface (SEM) reconstruction and its limitations will be explained. 3D volume reconstruction and tomography methods by electron microscopy (SEM/FIB and TEM) will be explained and compared with x-ray tomography. ...
Modern Scanning Electron Microscopes, when combined with Focused Ion Beams (Dual beam FIB-SEM), provide a larger number of multimodal imaging and analysis/characterisation modes at the nano- and micron-scales. The aim of the course is to present the extend ...
Modern Scanning Electron Microscopes, when combined with focused ion beams (Dual beam FIBs), provide a larger number of multi-modal imaging and different analytical methods. The course format consists of introductory lectures, lectures on advanced techniqu ...
This course completes the knowledge in plasma physics that students have acquired in the previous two courses, with a discussion of different applications, in the fields of magnetic confinement and controlled fusion, astrophysical and space plasmas, and so ...
The students will learn about the essential chemical, thermodynamic and physical mechanisms governing thin film growth, about the most important process techniques and their typical features, including process-microstructure-film properties relationships. ...
The course treats the main surface analysis methods for the characterization of surfaces, interfaces and thin films. It discusses how these methods can be applied to gain specific knowledge about structural, chemical and functional properties of surfaces a ...
Modern Scanning Electron Microscopes, when combined with focused ion beams (Dual beam FIBs), provide a larger number
of multimodal imaging and different analytical methods. The course format consists of introductory lectures, lectures on
advanced technique ...