Publications related to Shear mode bulk acoustic wave resonator based on c-axis oriented AIN thin film

Related publications (29)

A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films

Luis Guillermo Villanueva Torrijo, Florian Fernand Hartmann

This paper presents the use of a shear bulk acoustic mode resonator made of a membrane of X-cut lithium niobate (LiNbO3) for ultra-wide band filter applications. Aluminum interdigitated (IDT) electrodes are deposited on top of the LiNbO3 thin film as well ...

IEEE2023

Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic resonators for wide band filter applications in the frequency range of 3.5-4.5GHz. The resonators consist of a Lithium Niobate film with Aluminum top interdigitated electro ...

Institute of Electrical and Electronics Engineers2023

Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate

Luis Guillermo Villanueva Torrijo, Silvan Stettler

This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large e16 piezoelectric coefficient of YX36 degrees.-cut LNO, fabricated ...

Institute of Electrical and Electronics Engineers2023

Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates

Danick Briand, Luis Guillermo Villanueva Torrijo, Morgan Mc Kay Monroe

The development of fully solution-processed, biodegradable piezoelectrics is a critical step in the development of green electronics towards the worldwide reduction of harmful electronic waste. However, recent printing processes for piezoelectrics are hind ...

2023

Dataset for "Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates"

Danick Briand, Luis Guillermo Villanueva Torrijo, Morgan Mc Kay Monroe

This data set contains the data collected during the FNS project Green Piezo (Grant no. 179064) in association with the recent publication entitled “Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper ...

Zenodo2023

Development of Thin Film Lithium Niobate Shear Bulk Acoustic Wave Resonators

Soumya Yandrapalli

RF MEMS piezoelectric acoustic resonators are the essential building blocks for RF filters used in RF front-end modules for wireless mobile communication due to their compact size in the MHz-GHz frequency range, high Quality factors and large relative band ...

EPFL2022

Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

Luis Guillermo Villanueva Torrijo, Silvan Stettler

Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...

IEEE2022

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

The recently invented laterally excited bulk wave resonators (XBARs) demonstrate outstanding parameters suitable for the design of low loss filters for the fifth generation of mobile phones. The operation of XBARs can be interpreted as an excitation of ant ...

WILEY2021

X-Band Aom On Chip

Tobias Kippenberg, Junqiu Liu, Anat Siddharth, Terence Albert Emile Blésin

Silicon Nitride integrated photonic circuits have drawn much attention owing to its ultra-low loss and large Kerr nonlinearity. However, the lack of Pockels effect makes it difficult to be modulated clectro-optically, which posts a major challenge for the ...

IEEE2021

Fabrication, Characterization, and Simulation of Glass Devices with AlN Thin-Film Transducers for Excitation of Ultrasound Resonances

Paul Muralt, Ramin Matloub Aghdam

We present the fabrication of 570-mu m-thick millimeter-sized soda-lime-silicate float-glass blocks with a 1-mu m-thick AlN thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electromechanic ...

American Physical Society (APS)2021

Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators

Luis Guillermo Villanueva Torrijo, Andrea Lozzi, Marco Liffredo

In this paper we investigate the direct effect of resonator quality factor (Q) on the oscillator phase noise. We use 2-port contour mode resonators (CMRs), fabricated both with aluminum nitride (AlN) and aluminum scandium nitride (AlScN), as the frequency- ...

Institute of Electrical and Electronics Engineers2020

Hybrid integrated photonics using bulk acoustic resonators

Tobias Kippenberg, Junqiu Liu, Michail Zervas

Integrated photonic devices based on Si3N4 waveguides allow for the exploitation of nonlinear frequency conversion, exhibit low propagation loss, and have led to advances in compact atomic clocks, ultrafast ranging, and spectroscopy. Yet, the lack of Pocke ...

Nature Research2020

Monolithic piezoelectric control of soliton microcombs

Tobias Kippenberg, Junqiu Liu, Rui Ning Wang, Erwan Guillaume Albert Lucas, Wenle Weng, Jijun He, Arslan Sajid Raja, Miles Henry Anderson, Tianyi Liu

High-speed actuation of laser frequency(1)is critical in applications using lasers and frequency combs(2,3), and is a prerequisite for phase locking, frequency stabilization and stability transfer among optical carriers. For example, high-bandwidth feedbac ...

NATURE PUBLISHING GROUP2020

Mechanical resonators with high dissipation dilution in precision and quantum measurements

Sergey Fedorov

Position measurements of mechanical oscillators underpin experiments spanning from applied nanoscale sensing to endeavors aiming to resolve open fundamental problems of modern physics. Sufficiently precise position measurements are also used for engineerin ...

EPFL2021

Growth, Integration, and Functional Characterization of AlScN Thin Films for RF MEMS Devices

Fazel Parsapour

Mobile communication has grown explosively in recent years, leading to a strong demand for cheap, but high-performing bandpass filters with low insertion loss and smaller size. Surface acoustic wave (SAW) and thin film bulk acoustic wave (BAW) resonators r ...

EPFL2019

AlN and AlScN contour mode resonators for MEMS-based RF front ends

Andrea Lozzi

Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...

EPFL2019

Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

Paul Muralt, Thomas La Grange, Vladimir Pashchenko, Fazel Parsapour, Silviu Cosmin Sandu

Accurate property determination of the piezoelectric thin film material Al(1-x)Sc(x)N is necessary for designing the next generation of radio frequency resonators in mobile communication, and for testing results of ab initio calculations. Sound velocity an ...

WILEY2019

Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators

Teodoro Graziosi

Microresonators are fundamental building blocks of any photonic integrated circuit, as they can be used as filters, modulators, sensors, and to enhance light emission. If these resonators are suspended and are free to oscillate, we can exploit the interact ...

EPFL2019

A Novel Reconfigurable CMOS Compatible Ka Band Bandstop Structure Using Split-Ring Resonators and Vanadium Dioxide (VO2) Phase Change Switches

Mihai Adrian Ionescu, Andreas Schueler, Anna Krammer, Emanuele Andrea Casu, Andrei Müller, Junrui Zhang, Riyaz Mohammed Abdul Khadar

The article presents the design, fabrication and characterization of a novel complementary metal-oxidesemiconductor (CMOS) compatible reconfigurable Ka band bandstop structure using split ring resonators (SRR) while employing the Vanadium Dioxide (VO2) pha ...

IEEE2019

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Paul Muralt, Stefan Mertin, Andrea Mazzalai, Clemens Benedict Nyffeler

Scandium doped aluminium nitride (ScAlN) gained much attention during last years, since its piezoelectric response is much enlarged as compared to pure AlN films. Above 30% Sc the films are of high interest for piezoMEMS sensing and actuation, ultrasound g ...

IEEE2019