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Publication

Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

Paul Muralt, Fazel Parsapour, Vladimir Pashchenko
2017
Conference Papers

Abstract

Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al0.85Sc0.15N piezoelectric film on the silicon substrate were fabricated and characterized.

Official source

https://infoscience.epfl.ch/entities/publication/dfdd6486-2af4-477d-b9fb-e7cc11cd02e6

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Paul Muralt, Fazel Parsapour, Vladimir Pashchenko
2017
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/dfdd6486-2af4-477d-b9fb-e7cc11cd02e6

About this result

Related concepts (21)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Electronic component

An electronic component is any basic discrete electronic device or physical entity part of an electronic system used to affect electrons or their associated fields. Electronic components are mostly industrial products, available in a singular form and are not to be confused with electrical elements, which are conceptual abstractions representing idealized electronic components and elements. Electronic components have a number of electrical terminals or leads.

Surface acoustic wave

A surface acoustic wave (SAW) is an acoustic wave traveling along the surface of a material exhibiting elasticity, with an amplitude that typically decays exponentially with depth into the material, such that they are confined to a depth of about one wavelength. SAWs were first explained in 1885 by Lord Rayleigh, who described the surface acoustic mode of propagation and predicted its properties in his classic paper. Named after their discoverer, Rayleigh waves have a longitudinal and a vertical shear component that can couple with any media like additional layers in contact with the surface.

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