Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
The present invention concerns a bodily implantable or probe device and microelectrode fabrication method comprising providing at least one silicon substrate including an electronic device or unit; providing, on a first side of the silicon substrate, at least one conducting material for forming at least one elongated electrical channel of the microelectrode; providing an insulator material on the conducting material to define at least one active site or area of the microelectrode, providing a protection material or layer onto the first side of the silicon substrate or layer; etching the silicon material of a second side of the silicon substrate to form at least one elongated projection extending away from the silicon substrate, the elongated projection comprising the conducting material, and expose an elongated surface of the conducting material of the elongated projection; removing the protection material or layer from the first side of the silicon substrate; and providing a further insulator material on the exposed elongated surface of the conducting material to isolate the elongated electrical channel of the at least one microelectrode, and providing the further insulator material on the etched at least one silicon substrate.
Tobias Kippenberg, Johann Emmeram Riemensberger, Mikhail Churaev, Xinru Ji, Terence Albert Emile Blésin, Chengli Wang, Zihan Li, Junyin Zhang, Xi Wang, Chen Yang, Wil Kao