Publication

Ferroelectric thin films for micro-sensors and actuators: a review

Paul Muralt
2000
Journal Articles

Abstract

This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.

Official source

https://infoscience.epfl.ch/entities/publication/2f9e5c4c-0d05-4b4a-b065-e9d58f163b6e

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Paul Muralt
2000
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/2f9e5c4c-0d05-4b4a-b065-e9d58f163b6e

About this result

Related concepts (22)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Ferroelectricity

Ferroelectricity is a characteristic of certain materials that have a spontaneous electric polarization that can be reversed by the application of an external electric field. All ferroelectrics are also piezoelectric and pyroelectric, with the additional property that their natural electrical polarization is reversible. The term is used in analogy to ferromagnetism, in which a material exhibits a permanent magnetic moment. Ferromagnetism was already known when ferroelectricity was discovered in 1920 in Rochelle salt by Joseph Valasek.

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Related publications (11)

Ferroelectric thin films for micro-sensors and actuators: a review

Chat with Graph Search

Ultra-Thin Piezoelectric Film Optimization

Condition for the negative capacitance effect in metal–ferroelectric–insulator–semiconductor devices

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications