Publications related to Wafer-level hermetically sealed silicon photonic MEMS

Related publications (18)

Plasmonic biosensor enabled by resonant quantum tunnelling

Hatice Altug, Ivan Sinev, Mikhail Masharin

Metasurfaces provide an ideal platform for optical sensing because they produce strong light-field confinement and enhancement over extended regions that allow us to identify deep-subwavelength layers of organic and inorganic molecules. However, the requir ...

Nature Publishing Group2025

Low-noise, frequency-agile photonic integrated lasers

Anat Siddharth

Photonic integrated circuits (PICs) have revolutionized optical communication and precision metrology by enabling compact, scalable, and high-performance optical systems. However, conventional integrated laser sources suffer from limitations such as poor c ...

EPFL2025

Ultrafast Tunable Photonic Integrated Extended-DBR Pockels Laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu, Andrey Voloshin, Simone Bianconi

Hybrid photonic integrated lasers have revolutionized laser technology by combining the scalable manufacturing of simple laser diodes with high-performance features such as frequency stability, opticallinewidth, and tuning linearity [1], traditionally only ...

IEEE2025

Sub-2W tunable laser based on silicon photonics power amplifier

Joao Carlos Menezes Carreira, Michael Wolfgang Geiselmann

High-power tunable lasers are intensely pursued due to their vast application potential such as in telecom, ranging, and molecular sensing. Integrated photonics, however, is usually considered not suitable for high-power applications mainly due to its smal ...

Springer Science and Business Media LLC2025

Guided Nonlinear Optics for Information Processing

Demetri Psaltis

This special issue explores the dynamic and rapidly evolving field of optical computing, with a focus on guided nonlinear optics for information processing. Recent years have seen a resurgence of interest in this area [1], fuelled by groundbreaking experim ...

WALTER DE GRUYTER GMBH2025

Spatial quantum-interference landscapes of multi-site-controlled quantum dots coupled to extended photonic cavity modes

Elyahou Kapon, Alok Rudra, Benjamin Dwir, Alessio Massimiliano Davide Miranda

A compact platform to integrate emitters in a cavity-like support is to embed quantum dots (QDs) in a photonic crystal (PhC) structure, making them promising candidates for integrated quantum photonic circuits. The emission properties of QDs can be modifie ...

2025

Ultrafast tunable photonic-integrated extended-DBR Pockels laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu, Andrey Voloshin, Simone Bianconi

Frequency-agile lasers that can simultaneously feature low noise characteristics and fast mode-hop-free frequency tuning are keystone components for applications ranging from LiDAR and distributed sensing to communication and quantum information processing ...

Nature Publishing Group2025

On the Use of UV Femtosecond Pulses to Write Waveguides in Fused Silica

Yves Bellouard, Lisa Jutta Ackermann

Ultraviolet (UV) pulses at 450 fs are a powerful tool for femtosecond laser waveguide writing in fused silica. Whereas typically sub-200 fs pulses at a high exposure dose were required, UV light efficiently creates waveguides with propagation losses below ...

IEEE2025

Overview of the third JET deuterium-tritium campaign

Olivier Sauter, Benoît Labit, Holger Reimerdes

JET returned to deuterium-tritium operations in 2023 (DTE3 campaign), approximately two years after DTE2. DTE3 was designed as an extension of JET’s 2022-2023 deuterium campaigns, which focused on developing scenarios for ITER and DEMO, integrating in-dept ...

2025

Electro-optic sampling of classical and quantum light

Ileana-Cristina Benea-Chelmus

Full characterization of electric-field waveforms in amplitude and phase is achieved across the terahertz to visible spectral range through interaction with an optical pulse shorter than a half-cycle period via the Pockels (linear electro-optic) effect. Th ...

2025

Gate-Tunable Hole Transport in In-Plane Ge Nanowires by V-Groove Confined Selective Epitaxy

Shelly Ben David, Anna Fontcuberta i Morral, Alok Rudra, Victor Carle Adrien Boureau, Santhanu Panikar Ramanandan

Germanium (Ge) nanowires hold great promise as building blocks for hole spin-based quantum processors. Realizing this potential requires their direct integration onto silicon (Si) wafers. This work introduces V-groove-confined selective epitaxy to enable t ...

WILEY-V C H VERLAG GMBH2025

Integrated chirped photonic-crystal cavities in gallium phosphide for broadband soliton generation

Tobias Kippenberg, Johann Emmeram Riemensberger, Miles Henry Anderson, Nikolai Kuznetsov, Alisa Davydova

Chirped mirrors have underpinned advances in ultra-fast lasers based on bulk optics but have yet to be fully exploited in integrated photonics, where they could provide a means to engineer otherwise unattainable dispersion profiles for a range of nonlinear ...

2024

Ultraviolet to mid-infrared optical properties of sputtered Al(Sc)N-on-SiO2 thin films and experimental demonstration of AlN integrated photonic devices in the telecom C-band

Luis Guillermo Villanueva Torrijo, Hernán Furci

Thin film aluminum nitride (AlN) stands out as a promising material for integrated photonics due to its wide bandgap of 6.1 eV, facilitating efficient operation across diverse spectral ranges. Its inherent electro-optic and nonlinear optical properties mak ...

2024

Piezoelectric actuation for integrated photonics

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Anat Siddharth, Andrey Voloshin, Viacheslav Snigirev, Terence Albert Emile Blésin, Andrea Bancora, Vladimir Shadymov

Recent decades have seen significant advancements in integrated photonics, driven by improvements in nanofabrication technology. This field has been developed from integrated semiconductor lasers and low-loss waveguides to optical modulators, enabling the ...

Optica Publishing Group2024

Low-loss and high-index contrast ultraviolet-C free-standing waveguides made of thermal silicon oxide

Christophe Marcel Georges Galland, Claudio Alejandro Jaramillo Concha

Photonics in the ultraviolet provides an avenue for key advances in biosensing, pharmaceutical research, and environmental sensing. However, despite recent progress in photonic integration, a technological solution to fabricate photonic integrated circuits ...

2024

A fully hybrid integrated erbium-based laser

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji, Andrey Voloshin, Yang Liu, Andrea Bancora

Erbium-doped fibre lasers exhibit high coherence and low noise as required for fibre-optic sensing, gyroscopes, LiDAR and optical frequency metrology. Endowing erbium-based gain in photonic integrated circuits can provide a basis for miniaturizing low-nois ...

Nature Publishing Group2024

Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si3N4 photonic integrated circuits

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji

We demonstrate ultra-low propagation loss, lithographic precision, and wafer-scale manufacturing for high-density Si3N4 photonic integrated circuits using an efficient DUV-based subtractive approach. We show a propagation loss as low as 1.4 dB/m at 1.55 µm ...

Optical Society of America2024

Observation of Fundamental Charge Noise in Electro-Optic Photonic Integrated Circuits

Tobias Kippenberg, Johann Emmeram Riemensberger, Guanhao Huang, Zihan Li, Junyin Zhang

We observed that Lithium Niobate and Lithium Tantalate photonic integrated microresonators exhibit an unexpected Flicker type (i.e. 1/f1.2) scaling in the intrinsic refractive noise spectrum, significantly deviating from the well-established thermorefracti ...

Springer Science and Business Media Deutschland GmbH2024