Publication

High-density lithium niobate integrated photonics

Tobias Kippenberg, Johann Emmeram Riemensberger, Anat Siddharth, Mikhail Churaev, Zihan Li
2023

Abstract

We demonstrate a strip waveguide-based LiNbO3 photonic integrated circuit fabricated with a novel hard mask, diamond-like-carbon (DLC). The steep sidewall configuration exhibits tight optical confinement and dispersion control while preserving ultra-low loss of < 4 dB/m. In the meantime, a low noise self-injection locked laser is achieved with our chips.

Official source

https://infoscience.epfl.ch/entities/publication/1b508971-fa1e-4c3a-b0be-d72ceb7e9e1c

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High-density lithium niobate integrated photonics

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