Publication

ASSESSMENT OF MICROSTENCILING TECHNIQUE FOR LOW-COST PRODUCTION OF MICROELECTRODES

2005
Reports

Abstract

Shadow mask evaporation is a powerful technique which enables us to make micro- or nano-structures on substrates which are not feasible for conventional photolithography processes, such as plastics, pre-structured substrate, biologically/chemically modified surfaces, etc. In this project, we investigated (i) the transformation of apertures of microstencil mask after several metal deposition steps, and (ii) the resolution of deposited microstructures with/without a gap between a stencil mask and a substrate. The purpose was to asses the microstenciling technique as low-cost production process of microelectrodes onto plastic substrates, which could be applied, for instance, as sensor electrodes on BioMEMS, etc.

Official source

https://infoscience.epfl.ch/entities/publication/0d9cd222-7308-4174-b3da-3024b39c8652

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2005
Reports

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/0d9cd222-7308-4174-b3da-3024b39c8652

About this result

Related concepts (21)

Photolithography

In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate.

Photomask

A photomask is an opaque plate with transparent areas that allow light to shine through in a defined pattern. Photomasks are commonly used in photolithography for the production of integrated circuits (ICs or "chips") to produce a pattern on a thin wafer of material (usually silicon). Several masks are used in turn, each one reproducing a layer of the completed design, and together known as a mask set. For IC production in the 1960s and early 1970s, an opaque rubylith film laminated onto a transparent mylar sheet was used.

Cost curve

In economics, a cost curve is a graph of the costs of production as a function of total quantity produced. In a free market economy, productively efficient firms optimize their production process by minimizing cost consistent with each possible level of production, and the result is a cost curve. Profit-maximizing firms use cost curves to decide output quantities. There are various types of cost curves, all related to each other, including total and average cost curves; marginal ("for each additional unit") cost curves, which are equal to the differential of the total cost curves; and variable cost curves.

Related publications (6)

ASSESSMENT OF MICROSTENCILING TECHNIQUE FOR LOW-COST PRODUCTION OF MICROELECTRODES

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Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist

Implementing MEMS technology for soft, (bio)electronics interfaces.

STAMP FABRICATION FOR NANOIMPRINT LITHOGRAPHY BY PATTERN DEFINITION WITH STENCIL LITHOGRAPHY