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Related publications (36)

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Ultrafast Tunable Photonic Integrated Extended-DBR Pockels Laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu, Andrey Voloshin, Simone Bianconi

Hybrid photonic integrated lasers have revolutionized laser technology by combining the scalable manufacturing of simple laser diodes with high-performance features such as frequency stability, opticallinewidth, and tuning linearity [1], traditionally only ...

IEEE2025

Ultrafast tunable photonic-integrated extended-DBR Pockels laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu, Andrey Voloshin, Simone Bianconi

Frequency-agile lasers that can simultaneously feature low noise characteristics and fast mode-hop-free frequency tuning are keystone components for applications ranging from LiDAR and distributed sensing to communication and quantum information processing ...

Nature Publishing Group2025

Low temperature optical waveguide device fabrication method

Tobias Kippenberg, Zheru Qiu, Zihan Li

The present invention concerns an optical waveguide device fabrication method comprising providing at least one optical waveguide or optical waveguide core; and depositing at least one silicon dioxide layer or material onto the at least one optical wavegui ...

2024

Ultrafast Pockels-tunable hybrid integrated E-DBR laser

Tobias Kippenberg, Johann Emmeram Riemensberger, Anat Siddharth, Zheru Qiu, Simone Bianconi

We demonstrate a hybrid integrated frequency-agile laser based on an InP gain chip and an extended electro-optic Bragg waveguide reflector manufactured with a wafer-scale lithium niobate-on-insulator process featuring 10 GHz tuning range with high optical ...

Institute of Electrical and Electronics Engineers Inc.2024

Free Electron Interaction with Nonlinear Optical States

Tobias Kippenberg, Rui Ning Wang, Arslan Sajid Raja, Guanhao Huang, Zheru Qiu, Alexey Tikan, Aleksandr Tusnin, Yujia Yang

We couple free electrons with nonlinear optical states and frequency combs in photonic chip-based microresonators. Intracavity nonlinear dissipative structures including optical solitons imprint unique fingerprints in electron spectra and their Ramsey inte ...

Optical Society of America2023

Full C-band tunable integrated Erbium lasers via wafer-scale fabrication

Tobias Kippenberg, Rui Ning Wang, Anat Siddharth, Zheru Qiu, Xinru Ji

We demonstrate an integrated Erbium-based tunable laser using wafer-scale fabrication and ion implantation of silicon nitride photonic integrated circuits, and achieve single-frequency lasing tunable from 1530 nm to 1575 nm covering the entire optical C-ba ...

Institute of Electrical and Electronics Engineers Inc.2024

A Photonic Integrated High-power Soliton Microcomb Generator

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji, Andrey Voloshin

We demonstrate a compact soliton microcomb light source. The soliton is generated from a Kerr microresonator and amplified by an erbium-implanted gain section integrated on the same photonic chip. We achieved an output power of 7.9 mW at a compact device f ...

Optical Society of America2023

Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si3N4 photonic integrated circuits

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji

We demonstrate ultra-low propagation loss, lithographic precision, and wafer-scale manufacturing for high-density Si3N4 photonic integrated circuits using an efficient DUV-based subtractive approach. We show a propagation loss as low as 1.4 dB/m at 1.55 µm ...

Optical Society of America2024

Ultrafast Tunable Photonic Integrated E-DBR Pockels Laser

Tobias Kippenberg, Johann Emmeram Riemensberger, Anat Siddharth, Zheru Qiu, Simone Bianconi

The hybrid integration of III-V gain media with low-loss photonic integrated circuits has advanced the performance of laser systems in terms of laser stability and coherence. The advent of lithium niobate on insulator (LNOI) photonics for self-injection lo ...

Springer Science and Business Media Deutschland GmbH2024

Sub-kHz linewidth, high power, frequency agile photonic integrated E-DBR laser

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Anat Siddharth, Zheru Qiu, Xinru Ji

We demonstrate a novel class of lasers, based on the hybrid integration of an RSOA with an extended-distributed Bragg reflector (E-DBR) laser cavity implemented on a Si3N4 chip with microheaters. This enables us to reach sub-kHz laser linewidth with more t ...

Optical Society of America2023

Hybrid integrated multi-lane erbium-doped Si3N4 waveguide amplifiers

Tobias Kippenberg, Zheru Qiu, Xinru Ji

We present the integration of four individual erbium-doped waveguide optical amplifiers on a Si3N4 photonic integrated circuit hybrid integrated with a four-lane semiconductor pump laser diode chip. Each amplifier achieves 15 dB on-chip gain. ...

Optical Society of America2024

Large-Scale Photonic Chip Based Pulse Interleaver for Low-Noise Microwave Generation

Tobias Kippenberg, Rui Ning Wang, Zheru Qiu, Xinru Ji

We demonstrate a 64-times multiplication of a mode-locked laser’s 217 MHz pulse repetition rate to 14 GHz using an integrated Si3N4 interleaver. Six cascaded stages of Mach-Zehnder interferometers with up to 33 cm long optical delay lines are fully integra ...

Springer Science and Business Media Deutschland GmbH2024

A hertz-linewidth Erbium laser based on photonic integrated circuits

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji

We demonstrate a photonic integrated circuit-based Erbium laser by endowing an ultralow-loss silicon nitride integrated optical cavity with Erbium-based gain. The free-running laser achieves 50 Hz intrinsic linewidth, 17 mW output power, and 40 nm waveleng ...

Optical Society of America2023

Low-temperature and hydrogen-free silicon dioxide cladding for integrated photonics

Tobias Kippenberg, Rui Ning Wang, Zheru Qiu, Zihan Li

We demonstrate a hydrogen-free low-loss silicon oxide film deposited with SiCl4 and O2 precursor. A very wide low-loss window of 1300 nm to 1620 nm is achieved at deposition temperature as low as 300 ◦C. ...

Optical Society of America2023

Photonic substrate preparation method and photonic waveguide preparation or fabrication method

Tobias Kippenberg, Zheru Qiu, Xinru Ji, Marta Divall

Photonic integrated circuit optical waveguide device preparation or fabrication method comprising providing a silicon substrate, depositing at least one copper gettering silicon nitride layer or material, depositing at least one optical waveguide cladding ...

2024

Compact, Spatial-mode-interaction-free, Ultralow-loss, Nonlinear photonic integrated circuits

Tobias Kippenberg, Junqiu Liu, Rui Ning Wang, Johann Emmeram Riemensberger, Jijun He, Zheru Qiu, Xinru Ji

We implement Euler bends to build compact high-Q Si3N4 racetrack microresonators, featuring a small footprint of only 0.21 mm(2) for 19.8 GHz FSR. We demonstrate that these multi-mode microresonators can be operated in the single-mode regime and generate a ...

IEEE2022