Publications by Andrea Lozzi | EPFL Graph Search

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In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pu ...

In this paper we investigate the direct effect of resonator quality factor (Q) on the oscillator phase noise. We use 2-port contour mode resonators (CMRs), fabricated both with aluminum nitride (AlN) and aluminum scandium nitride (AlScN), as the frequency- ...

Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...

This paper presents the first phase noise (PN) measurements of oscillators based on aluminum scandium nitride (AlScN) resonators. 2-port AlScN contour mode resonators (CMR) operating at 195 MHz arc fabricated. A large pool of Q values (ranging from 150 to ...

We here present a study on the influence of metal electrodes on the anchor losses in Contour Mode Resonators (CMRs). Our Finite Element Modelling (FEM) simulation results show that electrode material is key to determine the acoustic losses, and therefore t ...

In this paper we propose a modified fabrication process to finely define the region surrounding the resonator that undergoes Si etching in CMRs. The unpredictable undercut has been shown to lead to Q instability within microns' variation. High aspect ratio ...

Implanted microelectrode arrays sense local neuronal activity, signals which are used as control commands for brain computer interface (BCI) technology. Patients with tetraplegia have used BCI technology to achieve an extraordinary degree of interaction wi ...

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...

Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...

Andrea Lozzi

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Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators

AlN and AlScN contour mode resonators for MEMS-based RF front ends

Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators

Anchor Losses Dependence on Electrode Material in Contour Mode Resonators

Release area confinement in Contour Mode Resonators

Longitudinal neural and vascular structural dynamics produced by chronic microelectrode implantation

Piezoelectric Nanoelectromechanical Systems

Engineered acoustic mismatch for anchor loss control in contour mode resonators