Publication

Piezoelectric Nanoelectromechanical Systems

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Tom Larsen, Andrea Lozzi, Muhammad Faizan, Kaitlin Marie Howell
2017
Conference Papers

Abstract

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.

Official source

https://infoscience.epfl.ch/entities/publication/e0d06d58-71ea-405f-9f77-244e3a89ec63

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Piezoelectric Nanoelectromechanical Systems

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Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

Systematic design of millisecond gasification reactor for the incorporation of gas-sieving nanopores in single-layer graphene

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications