Publications by Damien Maillard

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The objective of this PhD thesis is the development of a microfluidic platform for the real-time measurements of the mechanical properties of biological analytes at the single entity level. The systems developed for these purposes consist of piezoelectrica ...

Calorimetry of single biological entities remains elusive. Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typic ...

Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...

Piezoelectric-based resonators are some of the most used devices in the world. Invisible to most people, they constitute key elements for your mobile phone communications. With the advent of 50, the current technologies for piezoelectric resonators need to ...

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

Microcantilevers are popular transducers thanks to their simple design and a high sensitivity. In many applications, the cantilevers need to be actuated, either to induce a controlled deflection or to excite the resonance. This can be achieved with integra ...

3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-phot ...

We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brin ...

Damien Maillard

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Piezoelectric suspended microchannel resonators

Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Thin Film Devices For 5G Communications

Micro 3D printing of a functional MEMS accelerometer

Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

A 3D-Printed Functional Mems Accelerometer

Modular interface and experimental setup for in-vacuum operation of microfluidic devices