Publication

A 3D-Printed Functional Mems Accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard
2023
Conference Papers

Abstract

3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.

Official source

https://infoscience.epfl.ch/entities/publication/4b238eca-adf2-48bb-ab8a-b5fc71e4bb01

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A 3D-Printed Functional Mems Accelerometer

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Micro 3D printing of a functional MEMS accelerometer