Publications by Marco Mazza | EPFL Graph Search

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This paper presents the electrical design and characterization of a wafer-level, or 0-level, package for micro-electromechanical resonators. We start by identifying the requirements on the electrical parasitics of a packaged resonator, derived from an anal ...

This paper reports on the design, fabrication and detailed characteristics of multi-gate vibrating-body field effect transistors (VB-FETs). Double-gate and four-gate VB-FETs with resonance frequencies of 2 MHz and 71 MHz, respectively, are successfully dem ...

We have developed an active microphotodiode array (MPDA) for retinal stimulation. The unique feature of the device is that each pixel acts as an independent oscillator, whose frequency is controlled by the incident light intensity. The design is based on a ...

The paper deals with the oscillator applications based on vibrating mode of the suspended gate SG-MOSFET transistor. In order to simulate the electrical behavior of the transistor a small-signal equivalent circuit of the gate is proposed and validated. An ...

A novel approach for the detection of biomarkers in aqueous condition via differential impedance is presented. The binding of biomarkers onto functionalized inter-digital electrodes induces a change in the sensor impedance, both in its real and imaginary c ...

The design, fabrication and experimental investigation of 22-25 MHz fragmented-membrane MEM bulk lateral resonators (BLR) with 100 nm air-gaps on thin (1 and 6 [mu]m) silicon-on-insulator (SOI) are reported. Quality factors as high as 120,000 and motional ...

A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization voltages. A motional resistance of ...

Laterally vibrating-body double-gate MOSFET that shows a +30 dB signal increase compared to an identical resonator operating with pure capacitive detection is reported. The double-gate MOSFET is fabricated on SOI substrate with silicon film thickness of 1. ...

This work reports on the design, fabrication, and characterization of CMOS pixels for subretinal implants, which seems to be an effective way to recover visual capabilities in some types of blindness. Two possible approaches are presented for CMOS pixel im ...

Marco Mazza

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Electrical modeling and design of a wafer-level package for MEM resonators

Multi-gate vibrating-body field effect transistor (VB-FETs)

An active microphotodiode array of oscillating pixels for retinal stimulation

Oscillator Based on Suspended Gate MOS Transistors

Low-energy biomarker detection through charge-based impedance measurements

Nano-gap micro-electro-mechanical bulk lateral resonators with high quality factors and low motional resistances on thin silicon-on-insulator

Nano-gap high quality factor thin film SOI MEM resonators

Nanowire for Room Temperature Operated Hybrid CMOS-‘NANO’ Integrated Circuits

New Logic Family Based on Hybrid MOSFET-Polysilicon Nano-Wires

Laterally vibrating-body double gate MOSFET with improved signal detection

CMOS pixels for subretinal implantable prothesis

25.5 Mhz Silicon-on-insulator Bulk-mode Resonators: Design, Fabrication and Electrical Characterization

Scaling SOI photonics to micron and sub-micron devices

Tunable Oscillating CMOS Pixel for Subretinal Implants

Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps