Publication

Nano-gap high quality factor thin film SOI MEM resonators

Mihai Adrian Ionescu, Marco Mazza, Nicoleta-Diana Ciressan
2008
Conference Papers

Abstract

A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization voltages. A motional resistance of 55 k is measured at 18 V DC polarization and values still below 100 k can be measured at 14 V.

Official source

https://infoscience.epfl.ch/entities/publication/022e53fd-b99d-4118-9cbd-06aba996ce32

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Nano-gap high quality factor thin film SOI MEM resonators

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