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Jürgen Brugger

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Related publications (329)

Double-Gate Pentacene TFTs with Improved Control in Subthreshold Region

Mihai Adrian Ionescu, Jürgen Brugger, Dimitrios Tsamados, Katrin Sidler Arnet, Jyotshna Bhandari, Andreea Veronica Savu, Nenad Cvetkovic

In this work a double-gate pentacene TFT architecture is presented. The devices are fabricated on a polyimide substrate using three aligned levels of stencil lithography along with standard photolithography, which enable a soft yet well controlled device p ...

IEEE2009

Drop-On-Demand Inkjet Printing of SU-8 Polymer

Alcherio Martinoli, Vahid Fakhfouri, Jürgen Brugger, Grégory Mermoud, Joo Yeon Kim

This paper presents drop-on-demand inkjet printing of SU-8 on functionalized surfaces for direct printing of computer controlled polymer patterns. The high viscosity of SU-8 required an in-depth investigation of the print parameters such as pulse amplitude ...

2009

Focused Ion Beam: A Versatile Technique for the Fabrication of Nano-Devices

Christian Santschi, Jürgen Brugger, Olivier Martin, Oscar Vazquez Mena

2009

Minimized Blurring in Stencil Lithography using a Compliant Membrane

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Luis Guillermo Villanueva Torrijo

2009

Stencilled Conducting Bismuth Nanowires

Jürgen Brugger, Sam Neuser, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

2009

Nanostencil and InkJet Printing for Bionanotechnology Applications

Jürgen Brugger, Kristopher Pataky, Oscar Vazquez Mena

In this contribution we describe the application of Ink-Jet printing and Stencil Lithography in bionanotechnology. Both techniques are alternative patterning methods that can be used for the fabrication of biocompatible micro- and nanostructures out of the ...

2009

Mechanically tuneable microoptical structure based on PDMS

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Victor Javier Cadarso Busto

A PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlen ...

2009

Inkjet Printing of SU-8; A Case Study for Microlenses

Alcherio Martinoli, Vahid Fakhfouri, Dmitri Boiko, Jürgen Brugger, Edoardo Charbon, Grégory Mermoud, Nicolas Cantale, Joo Yeon Kim

This paper describes a novel method to fabricate polymer MEMS based on the inkjet printing of SU-8, with a special emphasis on integrated micro-optical lens arrays. Inkjet control parameters are optimized in order to enable a stable and reproducible ejecti ...

2008

Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Wafer-scale nanostencil lithography (nSL) is used to define several types of silicon mechanical resonators, whose dimensions range from 20 μm down to 200 nm, monolithically integrated with CMOS circuits. We demonstrate the simultaneous patterning by nSL of ...

2008

Optical Transmission Properties of Corrugated Nanoscale Hole Arrays in Thin Gold Films

Jürgen Brugger, Liza Carol Andrea Dunbar, Mona Julia Katharina Klein

2008

Bismuth nanowires with stencil lithography

Jürgen Brugger, Sam Neuser, Andreea Veronica Savu

2008

Stencil assisted reactive ion etching for micro and nano patterning

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Stencil-assisted oxygen reactive ion etching is a low-cost and parallel process for the replication of micrometric and nanometric patterns in any organic material. This lithography process allows the patterning of organic material non sensitive to electron ...

2008

Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro- /nanopatterns on surfaces

Cyrille Hibert, Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Sivashankar Krishnamoorthy

Wiley2008

Pentacene - SiO2 interface: Role of the environment prior to pentacene deposition and its impact on TFT DC characteristics

Mihai Adrian Ionescu, Jürgen Brugger, Dimitrios Tsamados, Katrin Sidler Arnet, Nenad Cvetkovic

In this paper we report on the effect of the environment on the SiO₂/pentacene interface. Two batches of bottom-contact pentacene thin-film transistors have been fabricated with a 100 nm thick SiO₂ as dielectric. Considerable shifts of the threshold voltag ...

IEEE2008

Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

Jürgen Brugger, Andreea Veronica Savu

2008

Direct fabrication of NIL stamps using Stencil Lithography

Jürgen Brugger, Oscar Vazquez Mena, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

Stencil Lithography has been used for the rapid and low cost fabrication of high resolution NIL stamps. The stamps are fabricated by Al deposition through a nanoscale shadow mask and subsequent Si etching. Features down to 50 nm in the stamps have been ach ...

2008

Resistless ion implantation of sub-micron scale features through nano-stencil

Philippe Langlet, Jürgen Brugger, Oscar Vazquez Mena, Luis Guillermo Villanueva Torrijo

Resistless ion implantation of sub-micron scale features through nano-stencil ...

2008

Charging dynamics of localized 2D layers of Si nanocrystals embedded into SiO2 by stencil masked ultra low energy ion implantation process

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Andreea Veronica Savu

2008

Mechanical stabilisation and design optimisation of masks for stencil lithography: Numerical approach and experimental validation

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Andreea Veronica Savu

This paper addresses mask deformation phenomenon that frequently occurs but is highly undesirable in stencil lithography. Previously, a technique for mechanical stabilisation of stencils was proposed [M.A.F. van den Boogaart, et al., Corrugated membranes f ...

2008

Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS

Jürgen Brugger, Cristina Martin Olmos

2008

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