Publications by Florian Calame

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Piezoelectric micro-electro-mechanical systems (MEMS) are finding an increased interest for applications requiring high frequency operation and high mechanical quality. The aim of this work was to improve piezoelectric MEMS along two main research directio ...

PZT (PbZrx Ti1-xO3) thin films have been locally grown by means of sol-gel deposition and local annealing on microhotplates. The microhotplates were based on a stress compensated Si3N4 /SiO2 membranes as structural elements and contained tantalum silicide filaments (Ta5Si3) for resistive heating. Above the filaments, a passivation layer of SiO2, an adhesion layer of Ti/TiO2 and a bottom electrode of Pt were deposited. Due to the low heat conductivity of the membrane, crystallization of the PZT film occurs e

A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped wit ...

Piezoelectric micromachined ultrasonic transducers comprising a 10 mu m thick Si device layer and a 14 pro thick piezoelectric PZT layer were investigated. The PZT films were deposited by a sol-gel technique. The transverse piezoelectric coefficient was me ...

Pb(Zr-x,Ti1-x)O-3 thin films of homogeneous composition were synthesized by means of a modified sol-gel route on Pt(111)/TiOx/SiO2/Si substrates. The usually observed gradient in B-site composition could be reduced from +/- 12 to +/- 12.5 at% amplitude in ...

We have developed a new hybrid AFM probe combining an SU-8 polymer body with a full tungsten cantilever having a nanometric tip. The fabrication is based on surface micromachining a silicon wafer, where tungsten is sputter deposited in oxidation sharpened ...

Florian Calame

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PZT thin film growth and chemical composition control on flat and novel three-dimensional micromachined structures for MEMS devices

Local growth of sol-gel films by means of microhotplates

Vibration Energy Harvesting with PZT Micro Device

Thick PZT sol-gel films for pMUT transducers performances improvement

Gradient free sol-gel Pb(Zr-x,Ti1-x)O-3 thin films

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications

Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals

Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices

Novel 3D PZT thin film structure for micromechanics

Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films

Growth and properties of gradient free sol-gel lead zirconate titanate thin films

Taking piezoelectric microsystems from the laboratory to production

Chemically derived seeding layer for {100}-textured PZT thin films