Publication

Local growth of sol-gel films by means of microhotplates

Nava Setter, Paul Muralt, Jacek Baborowski, Florian Calame, Sandrine Traversa Gentil, Nicolas Ledermann
2003
Journal Articles

Abstract

PZT (PbZrx Ti1-xO3) thin films have been locally grown by means of sol-gel deposition and local annealing on microhotplates. The microhotplates were based on a stress compensated Si3N4 /SiO2 membranes as structural elements and contained tantalum silicide filaments (Ta5Si3) for resistive heating. Above the filaments, a passivation layer of SiO2, an adhesion layer of Ti/TiO2 and a bottom electrode of Pt were deposited. Due to the low heat conductivity of the membrane, crystallization of the PZT film occurs exactly on the resistor filament. The formation of crystalline phase, i.e. perovskite PZT was verified by means of X-ray diffraction. A random PZT texture has been observed.

Official source

https://infoscience.epfl.ch/entities/publication/5a774bc3-bd68-4c3b-a6a2-25d6f764ea9d

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Nava Setter, Paul Muralt, Jacek Baborowski, Florian Calame, Sandrine Traversa Gentil, Nicolas Ledermann
2003
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/5a774bc3-bd68-4c3b-a6a2-25d6f764ea9d

About this result

Related concepts (32)

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Lead zirconate titanate

Lead zirconate titanate, also called lead zirconium titanate and commonly abbreviated as PZT, is an inorganic compound with the chemical formula It is a ceramic perovskite material that shows a marked piezoelectric effect, meaning that the compound changes shape when an electric field is applied. It is used in a number of practical applications such as ultrasonic transducers and piezoelectric resonators. It is a white to off-white solid. Lead zirconium titanate was first developed around 1952 at the Tokyo Institute of Technology.

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Local growth of sol-gel films by means of microhotplates

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