Paul Muralt

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Related publications (147)

Polarization reversal due to charge injection in ferroelectric films

Simon Bühlmann, Paul Muralt, Enrico Colla

The origin of a recently reported peculiar phenomenon-polarization reversal against the applied electric field in ferroelectric thin films [M. Aplanalp and P. Gunter, Ferroelectrics 258, 3 (2001), T. Morita and Y. Cho, Appl. Phys. Lett. 84, 257 (2004)]-has ...

2005

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Nicolas Ledermann, Paul Muralt, Nava Setter

This paper describes fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-mu m-thick Pb(Zr0.53Ti0.47O3) (PZT) thin films. The applied structures are circular plates held at four bridges, thus par ...

2005

Structural and dielectric properties of strain-controlled epitaxial SrTiO3 thin films by two-step growth technique

Paul Muralt, Nava Setter, Alexander Tagantsev, Konstantin Astafiev

Structural and dielectric properties of epitaxial SrTiO3 (STO) thin films on LaAlO3 substrates fabricated by a two-step growth technique using pulsed laser deposition were investigated by in situ and ex situ observations in terms of strain relaxation from ...

2005

Bandpass filters for 8 GHz using solidly mounted bulk acoustic wave resonators

Roman Lanz, Paul Muralt

Frequency shift, design, and fabrication issues have been investigated for the realization of 8 GHz handpass filters based on AlN thin film bulk acoustic wave resonators. Fabrication includes well-textured AlN thin films on Pt (111) electrodes and SiO2/AlN ...

2005

Strain relaxation of epitaxial SrTiO3 thin films on LaAlO3 by two-step growth technique

Paul Muralt, Nava Setter, Alexander Tagantsev, Konstantin Astafiev

Using pulsed-laser deposition, a two-step growth technique was applied to epitaxial SrTiO3 (STO) thin films on LaAlO3 substrates providing a way to obtain an effective strain relaxation in these films otherwise strained due to lattice mismatch between film ...

2005

Ferroelectric and piezoelectric properties of lanthanoid-substituted Bi4Ti3O12 thin films grown on (111)Pt and (100)IrO2 electrodes

Paul Muralt, Nava Setter

We investigated he effect of film orientation on piezoelectric and ferroelectric properties of (Bi(3.25)Ln(0.75))Ti3O12 (Ln=La, Nd, and Sm). c-axis-oriented films were grown on (111)Pt electrodes with nondoped Bi4Ti3O12 buffer layers. The films grown on (1 ...

2005

Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications

Thomas Maeder, Paul Muralt, Nava Setter

For micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in- ...

The Institute of Materials / Maney Publishing1995

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