Publication

Aluminum nitride thin films for high frequency applications

Paul Muralt
1999
Journal Articles

Abstract

A piezoelectric thin film sandwiched between two conductors is the basic structure for high frequency bulk acoustic wave devices. For that purpose, AlN thin films deposited by DC reactive sputtering on various electrode materials were investigated, Highly c-axis oriented thin films as thick as 2.5 mu m were grown on various substrates and analyzed. Intrinsic stress values ranging from strong compression to high tension were observed and piezoelectric d(33,f) coefficients up to 3.9 pm/V were measured. The first fabricated acoustic resonators showed a pronounced resonance peak centered at 2 GHz with a very high Q factor.

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https://infoscience.epfl.ch/entities/publication/0d97f734-8a62-46bc-912a-ca4e177f444d

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Paul Muralt
1999
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/0d97f734-8a62-46bc-912a-ca4e177f444d

About this result

Related concepts (32)

Electrode

An electrode is an electrical conductor used to make contact with a nonmetallic part of a circuit (e.g. a semiconductor, an electrolyte, a vacuum or air). Electrodes are essential parts of batteries that can consist of a variety of materials depending on the type of battery. The electrophore, invented by Johan Wilcke, was an early version of an electrode used to study static electricity. Electrodes are an essential part of any battery. The first electrochemical battery made was devised by Alessandro Volta and was aptly named the Voltaic cell.

High frequency

High frequency (HF) is the ITU designation for the range of radio frequency electromagnetic waves (radio waves) between 3 and 30 megahertz (MHz). It is also known as the decameter band or decameter wave as its wavelengths range from one to ten decameters (ten to one hundred meters). Frequencies immediately below HF are denoted medium frequency (MF), while the next band of higher frequencies is known as the very high frequency (VHF) band. The HF band is a major part of the shortwave band of frequencies, so communication at these frequencies is often called shortwave radio.

Super high frequency

Super high frequency (SHF) is the ITU designation for radio frequencies (RF) in the range between 3 and 30 gigahertz (GHz). This band of frequencies is also known as the centimetre band or centimetre wave as the wavelengths range from one to ten centimetres. These frequencies fall within the microwave band, so radio waves with these frequencies are called microwaves. The small wavelength of microwaves allows them to be directed in narrow beams by aperture antennas such as parabolic dishes and horn antennas, so they are used for point-to-point communication and data links and for radar.

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Aluminum nitride thin films for high frequency applications

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