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Related publications (144)

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Ferroelectric gate for control of transport properties of two-dimensional electron gas at AlGaN/GaN heterostructures

Nava Setter, Paul Muralt, Igor Stolichnov, Lisa Malin

The concept of a field-effect transistor with ferroelectric gate has been implemented using the GaN/AlGaN heterostructure combined with Pb(Zr,Ti)O-3 ferroelectric layer. The processing conditions were optimized in a way to obtain textured Pb(Zr,Ti)O-3 film ...

2006

Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates

Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin, Fazel Parsapour, Vladimir Pashchenko

It is more difficult to nucleate AlN-ScN alloy thin films (AlScN) in pure (0001)-texture than it is with pure AlN thin films. AlN thus can serve as seed layer for AlScN. Equipment limitations may lead to the problem of a vacuum break between AlN and AlScN ...

Ieee2017

Vibration Mode of MEMS Ultrasonic Sensors on Buckled Diaphragms with Piezoelectric Resonance Frequency Modification

Paul Muralt

Vibration mode and resonance frequency of piezoelectric MEMS ultrasonic sensors was investigated on buckled diaphragm structures. The buckling of the diaphragms was introduced intrinsically through residual stress control of the piezoelectric film, and ext ...

IEEE2019

Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

Waqas Bashir, Paul Muralt, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Kaitlin Marie Howell, Ramin Matloub Aghdam

Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction ha ...

2019

A micro heater platform with fluid channels for testing micro-solid oxide fuel cell components

Paul Muralt, Thomas Maeder, Bo Jiang

Micro-scale solid oxide fuel cell is a promising power generation technology for portable devices such as laptop, medical devices and personal electronics. One of the key goals in design of μ-SOFC systems is to use common hydrocarbon fuels such as propane/ ...

Elsevier2012

Fabrication, Characterization, and Simulation of Glass Devices with AlN Thin-Film Transducers for Excitation of Ultrasound Resonances

Paul Muralt, Ramin Matloub Aghdam

We present the fabrication of 570-mu m-thick millimeter-sized soda-lime-silicate float-glass blocks with a 1-mu m-thick AlN thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electromechanic ...

American Physical Society (APS)2021

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Nava Setter, Paul Muralt, Nicolas Ledermann

This paper describes fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-mu m-thick Pb(Zr0.53Ti0.47O3) (PZT) thin films. The applied structures are circular plates held at four bridges, thus par ...

2005

Electrical characterization of a buckling thermal energy harvester

Paul Muralt

This paper presents the electrical characterizations of a novel concept for thermal energy harvesting at micro scale. The devices presented here are based on a two-step transduction combining thermo-mechanical and piezoelectric conversion. The piezoelectri ...

Iop Publishing Ltd2015

Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films

Paul Muralt, Thomas La Grange, Fazel Parsapour, Silviu Cosmin Sandu, Lukas Riemer, Robin Nigon, Xiao Di

Sputter deposited A1ScN films with an Sc content of 38 at % were investigated by X-ray diffraction and electron microscopy to study the influence of the radio frequency (RF) bias on the growth of abnormally oriented grains (AOG). Scanning electron microsco ...

2020

The emergence of magnetic ordering at complex oxide interfaces tuned by defects

Paul Muralt, Vasiliki Tileli, Daesung Park

Complex oxides show extreme sensitivity to structural distortions and defects, and the intricate balance of competing interactions which emerge at atomically defined interfaces may give rise to unexpected physics. In the interfaces of non-magnetic complex ...

Nature Research2020

Metallic supporting grid for ultrathin electrolyte membranes in solid oxide fuel cells

Paul Muralt, Samuel Rey-Mermet

A solid oxide fuel cell structure obtainable by selective electrochemical processing, comprising an electrolyte membrane (4) formed by a thin film more than 50nm but less than l0[mu]m thick, covering a supporting structure (1) made of a bulk substrate, the ...

2007

Characterization methodology for lead zirconate titanate thin films with interdigitated electrode structures

Paul Muralt, Robin Nigon

The accurate evaluation of ferroelectric thin films operated with interdigitated electrodes is quite a complex task. In this article, we show how to correct the electric field and the capacitance in order to obtain identical polarization and CV loops for a ...

Amer Inst Physics2017

Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode

Paul Muralt, Silviu Cosmin Sandu, Ramin Matloub Aghdam, Andrea Mazzalai, Robin Nigon, Nachiappan Chidambaram, Davide Balma

The use of interdigitated electrodes (IDEs) in conjunction with ferroelectric thin films shows many attractive features for piezoelectric MEMS applications. In this work, growth of {1 0 0}-textured lead zirconate titanate (PZT) thin films was achieved on i ...

Institute of Physics2015

A low-temperature co-fired ceramic micro-reactor system for high-efficiency on-site hydrogen production

Thomas Maeder, Paul Muralt, Bo Jiang

A ceramic-based, meso-scale fuel processor for on-board production of syngas fuel was demonstrated for applications in micro-scale solid-oxide fuel cells (mu-SOFCs). The processor had a total dimension of 12 mm x 40 mm x 2 mm, the gas reforming micro react ...

Elsevier2015

Piezoelectric aluminum nitride thin films for microelectromechanical systems

Paul Muralt

This article reports on the state-of-the-art of the development of aluminum nitride (AlN) thin-film microelectromechanical systems (MEMS) with particular emphasis on acoustic devices for radio frequency (RF) signal processing. Examples of resonant devices ...

Cambridge University Press2012

Domain Pinning: Comparison of Hafnia and PZT Based Ferroelectrics

Paul Muralt, Robin Nigon

Even though many studies on the field cycling behavior of ferroelectric hafnium oxide have recently been published, the issue is still not fully understood. The initial increase of polarization during first cycles is explained by different theoretical and ...

Wiley2017

Polarization Reversal in BiFeO3 Capacitors: Complex Behavior Revealed by PFM

Nava Setter, Paul Muralt, Alexander Tagantsev, Igor Stolichnov, Enrico Colla, Monika Iwanowska

Polarization reversal in BiFeO3 (BFO) thin films in a parallel-plate capacitor configuration has been explored using piezo-force microscopy (PFM). Through-electrode mapping of the local piezoresponse allows for direct observation of the domain growth, whic ...

2011

Ferroelectric Gate on AlGaN/GaN Heterostructures

Nava Setter, Paul Muralt, Igor Stolichnov, Lisa Malin

A PZT, Pb(Zr,Ti)O-3 (40:60), ferroelectric layer has been successfully deposited onto a Al0.3Ga0.7N/GaN heterostructure with a 2DEG, two dimensional electron gas. Due to the chemical and temperature stability of AlGaN/GaN it was possible to implement the c ...

IEEE2007

Effect of oxygen defects blocking barriers on gadolinium doped ceria (GDC) electro-chemo-mechanical properties

Paul Muralt, Robin Nigon

Some oxygen defective metal oxides, such as cerium and bismuth oxides, have recently shown exceptional electrostrictive properties that are even superior to the best performing lead-based electrostrictors, e.g. lead-magnesium-niobates (PMN). Compared to pi ...

PERGAMON-ELSEVIER SCIENCE LTD2019

Comparison of Lead Zirconate Titanate Thin Films for Microelectromechanical Energy Harvester With Interdigitated and Parallel Plate Electrodes

Paul Muralt, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

Lead zirconate titanate (PZT) thin films on insulator-buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate electrode (PPE) structures because the former exploit the longitudinal pie ...

Ieee-Inst Electrical Electronics Engineers Inc2013