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Paul Muralt

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Related publications (147)

Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

Paul Muralt, Luis Guillermo Villanueva Torrijo, Ramin Matloub Aghdam, Waqas Bashir, Annalisa De Pastina, Kaitlin Marie Howell

Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction ha ...

2019

Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

Paul Muralt, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Lamb wave microresonators with wavelengths ...

AMER INST PHYSICS2019

Effect of oxygen defects blocking barriers on gadolinium doped ceria (GDC) electro-chemo-mechanical properties

Paul Muralt, Robin Nigon, Ahsanul Kabir

Some oxygen defective metal oxides, such as cerium and bismuth oxides, have recently shown exceptional electrostrictive properties that are even superior to the best performing lead-based electrostrictors, e.g. lead-magnesium-niobates (PMN). Compared to pi ...

PERGAMON-ELSEVIER SCIENCE LTD2019

Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

Paul Muralt, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

In this work, bar- and disk-shaped resonators were fabricated using Al(0.8)4Sc(0.16)N thin film Sensitivity analysis of the resonators' resonance frequencies with respect to the piezoelectric material parameters revealed that resonance analysis can be used ...

IEEE2018

Analysis of Performance Instabilities of Hafnia-Based Ferroelectrics Using Modulus Spectroscopy and Thermally Stimulated Depolarization Currents

Paul Muralt, Robin Nigon

2018

Combinatorial study of low-refractive Mg-F-Si-O nano-composites deposited by magnetron co-sputtering from compound targets

Paul Muralt, Jean-Louis Scartezzini, Silviu Cosmin Sandu, Stefan Mertin

2018

Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

Paul Muralt, Sylvain Nicolay, Gabriel Christmann, Stefan Mertin

2018

Probing-models for interdigitated electrode systems with ferroelectric thin films

Paul Muralt, Robin Nigon, Trygve Magnus Raeder

2018

Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator

Paul Muralt, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(33) an ...

IEEE2018

Which is the best thin film piezoelectric material?

Paul Muralt

The properties of piezoelectric thin films are reviewed for the case of the transverse piezoelectric effect using parallel plate electrodes. ...

Ieee2017

Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters

Paul Muralt, Silviu Cosmin Sandu, Clemens Benedict Nyffeler, Gabriel Christmann, Stefan Mertin, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, actuators and energy harvesting de ...

Ieee2017

A concept of wireless and passive very-high temperature sensor

Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai

There is a need for sensors capable operating at temperatures above 1000 degrees C. We describe an innovative sensor that might achieve this goal. The sensor comprises two main elements: a thermocouple and a surface acoustic wave (SAW) strain sensor. The c ...

Amer Inst Physics2017

Characterization methodology for lead zirconate titanate thin films with interdigitated electrode structures

Paul Muralt, Robin Nigon, Trygve Magnus Raeder

The accurate evaluation of ferroelectric thin films operated with interdigitated electrodes is quite a complex task. In this article, we show how to correct the electric field and the capacitance in order to obtain identical polarization and CV loops for a ...

Amer Inst Physics2017

Domain Pinning: Comparison of Hafnia and PZT Based Ferroelectrics

Paul Muralt, Robin Nigon

Even though many studies on the field cycling behavior of ferroelectric hafnium oxide have recently been published, the issue is still not fully understood. The initial increase of polarization during first cycles is explained by different theoretical and ...

Wiley2017

Sputter Deposition Technology For Al((1-X))Sc(X)N Films With High Sc Concentration

Paul Muralt, Sylvain Nicolay, Gabriel Christmann, Stefan Mertin

Aluminium scandium nitride (Al1-xScxN) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. This paper will concentrate on the de ...

IEEE2017

Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

Paul Muralt, Sylvain Ballandras, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to effi ...

Ieee2017

Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates

Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

It is more difficult to nucleate AlN-ScN alloy thin films (AlScN) in pure (0001)-texture than it is with pure AlN thin films. AlN thus can serve as seed layer for AlScN. Equipment limitations may lead to the problem of a vacuum break between AlN and AlScN ...

Ieee2017

Micro-solid state energy conversion membranes: influence of doping and strain on oxygen ion transport and near order for electrolytes

Paul Muralt

Enhancing the efficiency of micro-energy conversion devices through engineering of the structure-transport relationship is a prerequisite toward next generation micro-electrolysers and fuel cells. Here, oxygen ion conducting free-standing thin films are ke ...

Royal Society of Chemistry2017

Hybrid BAW/SAW AlN and AlScN Thin Film Resonator First Experimental data

Paul Muralt, Sylvain Ballandras, Ramin Matloub Aghdam, Vladimir Pashchenko

A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire subst ...

Ieee2016

A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb:TiO2 films via Si co-doping

Paul Muralt, Estelle Wagner, Giacomo Benvenuti, Silviu Cosmin Sandu, Scott Harada, Marc Jobin

Chemical beam vapour deposition (CBVD) is a thin film deposition technique operated under high vacuum conditions in which film growth occurs through the thermally activated chemical decomposition of precursor molecules at the substrate surface. This techni ...

Elsevier Science Sa2016

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