Publication

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

Paul Muralt
1999
Journal Articles

Abstract

Aluminum nitride thin films have been grown by reactive magnetron sputter technique using a pulsed power supply. The highly (002)-textured columnar films deposited on platinized silicon substrates exhibited quasi-single-crystal piezoelectric properties. The effective d(33) was measured as 3.4 pm/V, the effective e(31) as 1.0 C/m(2). The pyroelectric coefficient turned out to be positive (4.8 mu C m(-2) K-1) due to a dominating piezoelectric contribution. Thin-film bulk acoustic resonators (TFBAR) with fundamental resonance at 3.6 GHz have been fabricated to assess resonator properties. The material parameters derived from the thickness resonance were a coupling factor k=0.23 and a sound velocity v(s) = 11 400 m/s. With a quality factor Q of 300, the TFBARs proved to be apt for filter applications. The temperature coefficient of the frequency could be tuned to practically 0 ppm/K. (C) 1999 American Institute of Physics. [S0003-6951(99)01620-4].

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https://infoscience.epfl.ch/entities/publication/8972aaf2-cade-473d-8996-25f758e2dcc0

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Paul Muralt
1999
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/8972aaf2-cade-473d-8996-25f758e2dcc0

About this result

Related concepts (32)

Analogue filter

Analogue filters are a basic building block of signal processing much used in electronics. Amongst their many applications are the separation of an audio signal before application to bass, mid-range, and tweeter loudspeakers; the combining and later separation of multiple telephone conversations onto a single channel; the selection of a chosen radio station in a radio receiver and rejection of others.

Thin-film bulk acoustic resonator

A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes. FBAR devices using piezoelectric films with thicknesses ranging from several micrometres down to tenths of micrometres resonate in the frequency range of 100 MHz to 20 GHz.

Low-pass filter

A low-pass filter is a filter that passes signals with a frequency lower than a selected cutoff frequency and attenuates signals with frequencies higher than the cutoff frequency. The exact frequency response of the filter depends on the filter design. The filter is sometimes called a high-cut filter, or treble-cut filter in audio applications. A low-pass filter is the complement of a high-pass filter. In optics, high-pass and low-pass may have different meanings, depending on whether referring to the frequency or wavelength of light, since these variables are inversely related.

Related publications (32)

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

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