Lectures related to Wet Etching: Glass and Silicon

Dry Etching Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Wet Etching: Thin Films and Microfabrication MOOC: Micro and Nanofabrication (MEMS)

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Silicon Etching Techniques

Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.

Dry Etching: Techniques and Equipment MOOC: Micro and Nanofabrication (MEMS)

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Etch Stop Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Ion Beam Etching MOOC: Micro and Nanofabrication (MEMS)

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Microfabrication Technologies

Covers microfabrication technologies in a modern cleanroom environment, including cleanroom fundamentals, MEMS success stories, and hands-on activities.

Dry Etching Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Wet Etching: Crystal Structure and Anisotropy MOOC: Micro and Nanofabrication (MEMS)

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Photonic Crystals: Fabrication Techniques

Delves into the fabrication techniques of photonic crystals, inspired by natural structures like butterfly wings and opal stones.

Dry etching: fundamentals and applications MOOC: Micro and Nanofabrication (MEMS)

Explores the fundamentals of dry etching in a gas plasma and provides simple rules for choosing dry etchants.

Thin Film Devices: BCI

Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.

Thermo-mechanical Micro-actuator: Case Study MOOC: Micro and Nanofabrication (MEMS)

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Brain-Computer Interfaces: Silicon Technologies

Explores the design and fabrication of Brain-Computer Interfaces using silicon-based technologies and flexible materials, emphasizing key fabrication techniques and material properties.

Plasma Physics: Sheaths and Etching MOOC: Plasma Physics: Applications

Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.