Explores beam-matter interactions, focusing on emission phenomena from core electron ionization by X-Rays and electrons, and the competition between Auger and X-Rays emissions.
Covers the historical development and key components of Transmission Electron Microscopy, including electron gun, lenses, apertures, and specimen holders.
Covers X-Ray Micro-Analysis (XRMA) comparing techniques for analyzing matter with electron beams, discussing interaction volume, emission, fluorescence, and matrix effects.
Covers X-Ray Photoelectron Spectrometry (XPS), a surface analysis technique developed by Kai Siegbahn, explaining its components, mechanism, and analysis methods.
Covers the basics of Scanning Electron Microscopy, including electron-sample interactions, detectors, sample preparation, image formation, resolution, and contrasts in SEM images.
Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.
Covers the principles of Scanning Electron Microscopy, including SEM signals, detectors, and energy spectrum of electrons, as well as the efficiency of X-ray generation.