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This lecture covers the transfer function of the slave system in capacitive sensors, emphasizing that sensitivity is independent of non-linearity or drift. It explores various accelerometer technologies, including surface micromachined capacitive and bulk micromachined capacitive sensors. The lecture delves into the working principles of thermal MEMS accelerometers and resistive touch screens, detailing their construction and operation. Additionally, it discusses touch screen technologies such as capacitive and resistive screens, highlighting their differences and applications. The lecture concludes with a comparison of fingerprint sensor technologies, optical, capacitive, and ultrasound, focusing on size, method, cost, accuracy, and working current.
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