MEMS & Cleanroom: Thin Material Layers and Vapor Creation

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Related lectures (32)

Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.

PVD 7: Other Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Physical Vapor Deposition: Basics and Applications MOOC: Micro and Nanofabrication (MEMS)

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Film Growth: Growth Modes and Crystal Structure MOOC: Micro and Nanofabrication (MEMS)

Explores growth modes in film growth and crystal structure determination based on materials used.

Thin-Film Processing: Plasma Deposition

Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.

Sputtering: Plasma Formation and Thin Film Deposition MOOC: Micro and Nanofabrication (MEMS)

Covers sputtering, plasma creation, and thin film deposition processes.

Thin-Film Processing: Deposition Techniques

Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.

Physical Vapor Deposition: Principles and Applications

Explores the principles and applications of Physical Vapor Deposition (PVD) in microfabrication technologies, covering topics like metal microstructure creation and sputtering efficiency.

Sputtering: Ion Target Interactions MOOC: Micro and Nanofabrication (MEMS)

Examines ion-target interactions in PVD sputtering processes, covering compound deposition, surface damage, and factors influencing target ejection rates.

Thin Films: Deposition and Growth

Explores thin film preparation, growth mechanisms, organic film considerations, and deposition techniques in electronics.

Sputtering: Film Growth and Control Parameters MOOC: Micro and Nanofabrication (MEMS)

Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

Stress in Thin Films: Film Growth and Microfabrication MOOC: Micro and Nanofabrication (MEMS)

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Thin Film Growth: Mechanisms and Applications

Explores thin film growth mechanisms, organic thin film considerations, deposition techniques, and patterning for electronic devices.

Chemical Vapor Deposition: Oxide Formation and ALD MOOC: Micro and Nanofabrication (MEMS)

Explores CVD processes for oxide formation and ALD in micro and nanofabrication.

Thin Film Growth: Atoms Arrival and Adhesion MOOC: Micro and Nanofabrication (MEMS)

Delves into thin film growth, adhesion, crystal structure, and stresses.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Thin Films: Deposition and Patterning

Explores thin film preparation, growth mechanisms, and patterning techniques for organic electronic devices.

Gas Transport and Film Growth Rate MOOC: Micro and Nanofabrication (MEMS)

Covers mass transport in the boundary layer, gas transfer to the substrate, film growth rate calculation, and experimental results.

Focused Ion Beam: Principles and Applications

Explores the principles and applications of Focused Ion Beam (FIB) technology, including imaging, milling, and 3D microscopy.

Sputtering in CMi MOOC: Micro and Nanofabrication (MEMS)

Covers the operation of a cluster sputtering tool and the process of changing sputter targets.

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