Mediaspace scheduled maintenance: Aug 25, 2026 07:00 - 12:00 AM. During this time, videos will be temporarily unavailable. Check status updates.

Graph
Search

Cours

MICRO-501: MEMS Actuator practicals

Résumé

The goal of this practical work is to create thermal micro-actuators consisting of micro-cantilevers made out of silicon dioxide and covered by chromium meander-shaped electrical tracks and contact pads.

Séances de cours

Enseignant·e·s (3)

Jürgen Brugger

I am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.

Giovanni Boero

Arnaud Bertsch

Source officielle

Page Moodle

http://go.epfl.ch/MICRO-501

Résumé

Séances de cours

Enseignant·e·s (3)

Jürgen Brugger

Giovanni Boero

Arnaud Bertsch

Source officielle

Page Moodle

http://go.epfl.ch/MICRO-501

Cours associés (30)

MICRO-503: MEMS sensors practicals

The objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class. ...

EE-594: Smart sensors for IoT

This lecture provides insights in the design and technologies of Internet-of-Things sensor nodes, with focus on low power technologies. The lectures alternate every two weeks between sensing technologies of various kinds (prof. Ionescu) and their integrate ...

MICRO-470: Scaling laws in micro & nanosystems

This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles. ...

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...

EE-511: Sensors in medical instrumentation

Fundamental principles and methods used for physiological signal conditioning. Electrode, optical, resistive, capacitive, inductive, and piezoelectric sensor techniques used to detect and convert physiological information to electrical signals. Medical dev ...

Afficher plus